Errors resulting from magnification variations of optical system are largely generated in three-dimensional shape measurements. When the surface morphology with depth discontinuity is measured by DFF, a series of images are acquired and then magnifica...
Errors resulting from magnification variations of optical system are largely generated in three-dimensional shape measurements. When the surface morphology with depth discontinuity is measured by DFF, a series of images are acquired and then magnification changes are minimized or negligible. However, the magnification variations are actually existed in optical system, and so focus measures are wrongly computed in the DFF. In this paper, a DFF-based methodology considering the magnification changes is proposed to make more accurate measurement in surface morphology with depth discontinuity. Several experiments show that the proposed method outperforms existing ones without the consideration of magnification changes.