CAE를 이용한 나노 임프린트 스테이지의 동적 거동해석

다국어 초록 (Multilingual Abstract)

A precision nano-imprinting stage has been widely used in the fields of the nano-technology. In this study, an analysis method of a nano-imprinting stage machine using FEM and flexible multi-body kinematics and dynamics has been presented. We have developed a virtual imprinting machine to evaluate the prototype design in the early design stage. The simulation using CAE for the imprinting machine is not only to analyze static and dynamic characteristics of the machine but also to determine design parameters of the components for the imprinting machine, such as dimensions and specifications of actuators and sensors. Structural components as the upper plate, the rotator, the shaft and the translator have been modeled with finite elements to analyze flexibility effects during the precision stage motion. In this paper flexible multi-body dynamic simulation is executed to support robust design of the precision stage mechanism. In addition, we made the 4-axis stage model to compare with 3-axis stage model.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. State mechanism
• 3. 스테이지 모델링
• 4. FEM modeling and flexible body
• 5. Stage 거동 특성
• 6. 결론
• 후기
• 참고문헌