박막 인덕터와 제조와 DC-DC Converter에의 적용 = Fabrications of Thin Film Inductors and Its Applications for DC-DC Converter

다국어 초록 (Multilingual Abstract)

Thin film inductors of 10 mm×10 mm with inner coil type of 5 turns were fabricated by sputtering, photo-masking, and etching processes. The inductor has an inductance of 585 nH at 1MHz. And to estimate the applicability of the thin film inductors fabricated in this research to DC-DC converters. the test board of DC-DC converters was made. It was a boost type and input voltage of 2.7 to 5 volts. output voltage of 5 volts, and the switching frequency was 1.6 MHz. When the thin film inductor was adopted, the converter was operated normally. and the maximum efficiency was 49 % at the load of 50.5 Ω and the output power was 0.51 W. This result was not satisfactory for practical usage at present, but the switching FET devices for higher frequency use be developed in the near future, and then more higher frequency switching DC-DC converter will adopt these inductors.