In this paper, the SEM (scanning electron microscope) image processing system using PC (personal computer) is designed, so it is low cost and easy to use. We designed the deflection signal generator, the image grabber board and the interface board. Th...
In this paper, the SEM (scanning electron microscope) image processing system using PC (personal computer) is designed, so it is low cost and easy to use. We designed the deflection signal generator, the image grabber board and the interface board. The implemented SEM image processing system has ten zoom levels from 200 times to 200,000 times and three scanning speeds (1/30 sec, 1 sec, 6 sec). And a new algorithm for the SEM image interpolation is proposed. By using wavelet transform to find the edge regions and using the adaptive interpolation algorithm, high quality edge preserving image interpolation is achieved. The enlarged images, which are produced from this method, are shown to be aesthetically superior to images enlarged by the standard methods of linear and cubic B-spline interpolation.