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KISS
We developed SAW gas sensor for monitoring SOx gas with high sensitivity. It was fabricated as a microsensor for detecting SOx gas by depositing sensing material on SAW device. As a detecting layer material, CdS was selected. Deposition of CdS in the ...
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RISS 인기검색어
https://www.riss.kr/link?id=A3316212
-
저자
이찬우 ; 노용래 ; 정종식 ; 백성기 ( Chanwoo lee ; Yongrae Roh ; Jongshik Chung ; Sunggi Baik )
- 발행기관
- 학술지명
- 권호사항
-
발행연도
1996
-
작성언어
-
-
KDC
500
-
등재정보
KCI등재후보
-
자료형태
학술저널
- 발행기관 URL
-
수록면
41-48(8쪽)
- 제공처
- 소장기관
-
0
상세조회 -
0
다운로드
부가정보
다국어 초록 (Multilingual Abstract)
We developed SAW gas sensor for monitoring SOx gas with high sensitivity. It was fabricated as a microsensor for detecting SOx gas by depositing sensing material on SAW device. As a detecting layer material, CdS was selected. Deposition of CdS in the form of thin films was carried out by the ultrasonic spray pyrolysis method using ultrasonic spray nozzle. Thin films with the uniform and large surface area for sensors were deposited. The stable pyrolysis environment provided by uniform and fine droplets formed by spray nozzle made it possble to obtain thin films with excellent quality. The minimum grain size of the CdS thin films was about 50 nm when deposited at 300℃. SAW gas sensors showed reasonable sensitivity and reproducibility. Further studies are required to investigate the interference of other gases to SOx gas detection.
We developed SAW gas sensor for monitoring SOx gas with high sensitivity. It was fabricated as a microsensor for detecting SOx gas by depositing sensing material on SAW device. As a detecting layer material, CdS was selected. Deposition of CdS in the form of thin films was carried out by the ultrasonic spray pyrolysis method using ultrasonic spray nozzle. Thin films with the uniform and large surface area for sensors were deposited. The stable pyrolysis environment provided by uniform and fine droplets formed by spray nozzle made it possble to obtain thin films with excellent quality. The minimum grain size of the CdS thin films was about 50 nm when deposited at 300℃. SAW gas sensors showed reasonable sensitivity and reproducibility. Further studies are required to investigate the interference of other gases to SOx gas detection.
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