300mm 웨이퍼 팹의 포토공정 구역에서 로트 반송규칙과 일정계획에 관한 연구 = Operation logics for lot delivery and scheduling in a photolithography bay of 300mm wafer Fab

다국어 초록 (Multilingual Abstract)

This study treats the operation logics for lot delivery implemented in AMHS(automated material handling system) in a 300mm wafer Fab. An intra-bay of 300mm wafer Fab has multiple side-track buffers and a stocker. Side-track buffer and stocker are temporary storage space in 300mm Fab. That is, before a wafer lot is loaded into a load port of equipment by over-head transporter(OHT), wafer lot waits for the following operations in a stocker or a side-track buffer(STB) corresponding to the intra-bay of equipment. Therefore, in this paper, we developed various lot destination decision rules, delivery priority rules and OHT selection rules. Results of computational simulation on randomly generated test problems show the effectiveness of the above operation logics and delivery strategies.

참고문헌 (Reference)

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