MEMS 추력기를 위한 마이크로 점화기의 제작 방법 및 성능 평가

다국어 초록 (Multilingual Abstract)

Micro igniter on the glass membrane for MEMS thruster was developed. The stability of the micro igniter by using a glass membrane with a thickness of tens of microns was improved. The micro igniter was fabricated by anisotropic wet etching of photosensitive glass and deposition of Pt/Ti for electric heat coil. The solid propellant was loaded into the propellant chamber without an especial technique due to the high structural stability of the glass membrane. Ignition tests were performed successfully. The minimum ignition delay was 27.5 ms with an ignition energy of 19.3 mJ.

참고문헌 (Reference)

1 이종광, "평판형 마이크로 고체 추진제 추력기의 설계, 제작 및 평가" 한국추진공학회 10 (10): 77-84, 2006

2 Rossi, C., "Theoretical and Experimental Study of Silicon Micromachined Microheater with Dielectric Stacked Membranes" 63 (63): 183-189, 1997

3 Tanaka, S., "Test of B/Ti Multilayer Reactive Igniter for a Micro Solid Rocket Array Thruster" 144 (144): 887-890, 2008

4 Rossi, C., "Realization and Performance of Thin SiO2/SiNx Membrane for Micro Heater Applications" 64 (64): 241-245, 1998

5 Rossi, C., "Pyrotechnic Actuators : a New Generation of Si Integrated Actuator" 74 (74): 211-215, 1999

6 Dietrich, T. R., "Photoetchable Glass for Microsystems : Tips for Atomic Force Microscopy" 3 (3): 187-189, 1993

7 Rossi, C., "Micropyrotechnics, a New Technology for Making Energetic Microsystems : Review and Prospective" 120 (120): 297-310, 2005

8 Rossi, C., "Matrix of 10 × 10 Addressed Solid Propellant Microthrusters : Review of the Techn ologies" 126 (126): 241-252, 2006

9 Rossi, C., "Final Characterization of MEMS-based Pyrotechnical Microthrusters" 121 (121): 508-514, 2005

10 Zhang, K. L., "Fabrication, Modeling and Testing of a Thin Film Au/Ti Microheater" 46 (46): 580-588, 2007

11 Lewis Jr. D. H., "Digital Micro Propul sion" 80 (80): 143-154, 2000

12 Baroncini, M., "Characterization of an Embedded Microheater for Gas Sensors Application" 164-167, 2001

13 Gajda, M. A., "Applica tions of Thermal Silicon Sensors on Membranes" 49 (49): 1-9, 1995