Corrective Machining Algorithm for Improving the Motion Accuracy of Hydrostatic Bearing Tables

다국어 초록 (Multilingual Abstract)

For improving the motion accuracy of hydrostatic tables, a corrective machining algorithm is proposed in this paper.
The algorithm consists of three main processes. The reverse analysis is performed firstly to estimate the rail profile from the measured linear and angular motion error, in the algorithm. For the next step, the corrective machining information is obtained based upon the estimated rail profile. Finally, the motion errors on the correctively machined rail are analyzed by using the motion error analysis method. These processes are iterated until the analyzed motion errors are satisfactory within the target accuracy. In order to verify the validity of the algorithm theoretically, the motion errors calculated by the estimated rail after the corrective machining process, are compared with those by the true rail which is previously assumed as the initially measured value. The motion errors calculated using the estimated rail show good agreement with the assumed values, and it is shown that the algorithm is effective in acquiring the corrective machining information to improve the accuracy of hydrostatic tables.

목차 (Table of Contents)

• ABSTRACT
• 1. Introduction
• 2. Corrective Machining Algorithm
• 3. Reverse Analysis Method
• 4. Building the Corrective Machining Information
• 5. Theoretical Verification of the Corrective Machining Algorithm
• 6. Conclusions
• Acknowledgement
• References

참고문헌 (Reference)

1 "Theoretical Verification on the Motion Error Analysis Method of Hydrostatic Bearing Tables Using a Transfer Function" 4 (4): 64-70, 2003.

2 "Matrix Theory for the System Control The Society of Instruments and Control Engineers" 1981.

3 "Experimental Verification on the Motion Error Analysis Method of Hydrostatic Bearing Tables Using a Transfer Function" 4 (4): 57-63, 2003.