CHEMICAL VAPOR DEPOSITION에 依한 炭素/炭素 複合材料의 高密度化 = A Study on Densification of Carbon/Cardon Composites by Chemical Vapor Deposition

다국어 초록 (Multilingual Abstract)

This study was carried out to investigate the effects of the reactor conditions and some structural charactersistics of the substrates on densification of C/C Composites by Chcmical Vapor Deposition, using Isothermal process and propylene as a carbon source gas.
With increasing temperature of the reactor, the rate of deposition was also increased, but above some temperature the pyrolytic carbon deposition occured more on the surface of substrates than on the inside of pores.
The deposition rate was changed increasingly as the concentration of the source gas diluted with nitrogen was increased, but above some concentration the low density-sooty carbon was formed in the reactor.
The effect of the flow rate of diluted gas was similar to that of the concentration.
The total mass gain was grown up according as the reaction time used on CVD was grown up, but the mass gain ratio was become smaller.
The results affected only by the initial density or initial porosity of the substrates were uncertain.
The optimum conditions in this system were as follows:
temperature of reactor :800℃
concentration of carbon source gas :20%vol.
flow rate of carbon source gas :13.2cc/min