A cartridge for FET type sensors was designed and fabricated by using micromachining techniques such as silicon etching and bonding techniques. The photosensitive polymer(THB 30) is used to define an uniform micropool and to encapsulate the sensor sur...
A cartridge for FET type sensors was designed and fabricated by using micromachining techniques such as silicon etching and bonding techniques. The photosensitive polymer(THB 30) is used to define an uniform micropool and to encapsulate the sensor surface. A REFET is fabricated to replace the conventional reference electrode using photosensitive polymer(OMR 83). The fabricated cartridge includes four electrolyte sensors (H^(+), K^(+), Ca^(2+), Na^(+)), and the dead volume of intergrated flow channel is about 8μl.