The un-doped Bi_4Ti_3O_12(BIT)and W-doped Bi_4Ti_3O_12(BTW) thin films were prepared on Pt(111)/Ti/Sio_2/Si(100) substrates by a sol-gel process amd spin caoting method.
The films were analyzed by X-ray diffraction(XRD)and scanning electron microscop...
The un-doped Bi_4Ti_3O_12(BIT)and W-doped Bi_4Ti_3O_12(BTW) thin films were prepared on Pt(111)/Ti/Sio_2/Si(100) substrates by a sol-gel process amd spin caoting method.
The films were analyzed by X-ray diffraction(XRD)and scanning electron microscopy(SEM).
The ferroelectric hysteresis loops and the fatigue properties were obtained using a RT66A
ferroelectric tester.X-ray diffraction measurements showed layered perovskite structures with a single phase in both films.
The remanent polarization(2 P_r)and the coercive field(2 E_c)fo the BTW thin film were 16 u C/㎠ and 115 ㎸/㎝,respectively, with a applied field of 170 ㎸/㎝.
In addition,the BTW thin film showed a low fatigue behavior up to 4.5×10^10 read/write cycles.The dielectric constant was measured 400 at 10 ㎑.