A systematic study has been carried out on MOS FETs whose channel region geometry designed diagonally or semi-diagonally according to the cross position and angle between active region and gate electrode are fabricated. Their electrical characteristic...
A systematic study has been carried out on MOS FETs whose channel region geometry designed diagonally or semi-diagonally according to the cross position and angle between active region and gate electrode are fabricated. Their electrical characteristics and hot carrier reliability are measured and then com paired with those of conventional device. Better hot carrier reliability and reduced device performance (Gm, ID, etc.) are; obtained using this device structure, compared to those of conventional device. For this reasons, the design guide-line of semi-diagonal and diagonal device will be discussed.