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      Al-Si쇼트키 장벽을 이용한 표면 트랜지스터에 관한 연구 = A Study on the Surface Transistor using Al-Si Schottky Barrier

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      https://www.riss.kr/link?id=A2001592

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      In this study, the surface transistors using Al-Si Schottky barrier with thickness of tunnel oxide layer 40Å were fabricated by photolithography method and those characteristics were investigated. As a result, current gain and offset voltage of the devices, in P-type were 15, 0.3V, in N-type 13, 0.4V, respectively. The device is featured by very simple processing, and shows promise in a variety of application, including VLSI high speed IC's.
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      In this study, the surface transistors using Al-Si Schottky barrier with thickness of tunnel oxide layer 40Å were fabricated by photolithography method and those characteristics were investigated. As a result, current gain and offset voltage of the ...

      In this study, the surface transistors using Al-Si Schottky barrier with thickness of tunnel oxide layer 40Å were fabricated by photolithography method and those characteristics were investigated. As a result, current gain and offset voltage of the devices, in P-type were 15, 0.3V, in N-type 13, 0.4V, respectively. The device is featured by very simple processing, and shows promise in a variety of application, including VLSI high speed IC's.

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