In this study, the surface transistors using Al-Si Schottky barrier with thickness of tunnel oxide layer 40Å were fabricated by photolithography method and those characteristics were investigated. As a result, current gain and offset voltage of the ...
In this study, the surface transistors using Al-Si Schottky barrier with thickness of tunnel oxide layer 40Å were fabricated by photolithography method and those characteristics were investigated. As a result, current gain and offset voltage of the devices, in P-type were 15, 0.3V, in N-type 13, 0.4V, respectively. The device is featured by very simple processing, and shows promise in a variety of application, including VLSI high speed IC's.