Multiferroic BiFeO3 Thin Films Prepared by Using a Conventional RF Magnetron Sputtering Method

다국어 초록 (Multilingual Abstract)

Multiferroic BiFeO3 thin films were deposited on Pt/Ti/SiO2/Si substrates by rf magnetron
sputtering using self-made BFO ceramic targets. The influence of the partial pressure of oxygen
(P(O2)), as well as the substrate temperature, on the preparation of pure BFO films was studied.
BFO thin films with a single perovskite phase were obtained only for a P(O2) of 0.3 mTorr to 1.5
mTorr at a substrate temperature of 400℃, with subsequent annealing at 500℃ in a N2 ambient.
The impurity phase rather than perovskite BFO phase could be easily formed due to the excess Bi
content for a low P(O2) of 0.1 mTorr. A BFO thin lm having high c-axis orientation could be
obtained for a P(O2) of 0.3 mTorr, which has the maximum remanent polarization of 5.2uC/cm2.
The leakage current behaviors, as well as the magnetic properties, of the BFO lms are elucidated
by using a compositional analysis of Fe3+ and Fe2+ ions from the X-ray photoelectron spectroscopy
studies.

다국어 초록 (Multilingual Abstract)

Multiferroic BiFeO3 thin films were deposited on Pt/Ti/SiO2/Si substrates by rf magnetron
sputtering using self-made BFO ceramic targets. The influence of the partial pressure of oxygen
(P(O2)), as well as the substrate temperature, on the preparation of pure BFO films was studied.
BFO thin films with a single perovskite phase were obtained only for a P(O2) of 0.3 mTorr to 1.5
mTorr at a substrate temperature of 400℃, with subsequent annealing at 500℃ in a N2 ambient.
The impurity phase rather than perovskite BFO phase could be easily formed due to the excess Bi
content for a low P(O2) of 0.1 mTorr. A BFO thin lm having high c-axis orientation could be
obtained for a P(O2) of 0.3 mTorr, which has the maximum remanent polarization of 5.2uC/cm2.
The leakage current behaviors, as well as the magnetic properties, of the BFO lms are elucidated
by using a compositional analysis of Fe3+ and Fe2+ ions from the X-ray photoelectron spectroscopy
studies.

참고문헌 (Reference)

1 T. Kimura, 426 : 55-, 2003

2 J. F. McGilp, 10 : 3445-, 1977

3 J. Wang, 307 : 1203-, 2005

4 J. Wang, 299 : 1719-, 2003

5 Y. Schuhl, 79 : 2055-, 1983

6 Y. Wang, 88 : 142503-, 2006

7 W. Eerenstein, 307 : 1203-, 2005

8 C. T.-Munoz, 24 : 1051-, 1985

9 P. Fischer, 13 : 1931-, 1980

10 S. Iakovlev, 97 : 094901-, 2005

11 Y. H. Lee, 87 : 172901-, 2005

12 K. Tominaga, 21 : 688-, 1982

13 H. B, 87 : 072508-, 2005

14 S. Bose, 90 : 212902-, 2007

15 Th. Schedel-Niedrig, 52 : 17449-, 1995

16 Seiji Nakashima, "Ferroelectric and Magnetoelectric Properties of BiFeO3 Thin Films Prepared on a Membrane Structure" 한국물리학회 51 (51): 882-886, 2007

17 Eun Jin Choi, "Ferroelectric Properties of (La, Mn)-codoped BiFeO3 Thin Films Prepared by a Chemical Solution Deposition" 한국물리학회 51 (51): 138-142, 2007

18 Jong Kuk Kim, "Enhanced Ferroelectric Properties of Mn-Doped BiFeO3 Thin Films Prepared by Chemical Solution Deposition" 한국물리학회 49 (49): 566-570, 2006