3차원 입자 모델을 이용한 마그네트론 스퍼터링 음극의 특성 분석

다국어 초록 (Multilingual Abstract)

A 3D particle code is developed to analyze electron behavior in a planar magnetron sputtering cathode either in balanced or unbalanced configuration. Three types of collisions are included; electron - neutral elastic, excitation to a metastable state and ionization. Flight path is calculated by a 4-th order Runge-Kutta method with a time step of 10 ps. Effects of electron starting position, magnetic field intensity and configuration were analyzed. For a more efficient and accurate modeling, multithreading technique is considered for multicore CPU computers. Under an assumption of cold ion approach, target erosion profiles are predicted for a flat target surface.

목차 (Table of Contents)

• Abstract
• 1. 서론
• 2. 실험 방법 및 수치 모델의 구성
• 3. 모델링 결과 및 고찰
• 4. 결론
• 후기
• 참고문헌

참고문헌 (Reference)

1 Q. Fan, 36 : 244-, 2003

2 T. E. Sheridan, A8 : 30-, 1990

3 A. Wendt, A6 : 1827-, 1988

4 S. Kondo, 32 : 1142-, 1999

5 J. W. Bradley, 135 : 221-, 2001

6 J. O'Brien, 142-144 : 621-, 2001

7 S. N. Nahar, 35 : 2051-, 1987

8 M. H. Kalos, "Monte Carlo Methods Volume I: Basics" John Wiley & Sons 61-, 1986

9 J. Phillips, "High performance computing with CUDA:Molecular Dynamics" 2007

10 S. Brown, "Basic data of plasma physics" American Vacuum Society AIP press 230-, 1994