In this paper, we present the affection of pore generation with respect to variation of temperature in the anodic aluminum oxidation(AAO) process. In conventional AAO methods for aluminum bulk sheet over 25mm, mild anodizing method with low anodizing ...
In this paper, we present the affection of pore generation with respect to variation of temperature in the anodic aluminum oxidation(AAO) process. In conventional AAO methods for aluminum bulk sheet over 25mm, mild anodizing method with low anodizing voltage at 4oC temperature has usually been used. However, it is required to have a long processing time for mass production. In this paper, we suggested the hard anodizing method by low temperature for aluminum thin film of 1mm. Through various AAO experiments with respect to the variation of temperature, pore diameter and inter-pore(between pore and pore) distance at large area can be determined. In order to analysis the pore generation, FE-SEM was measured. Pore diameter and inter-pore distance are about 200nm and 250nm. Finally, concave nano-structures with various diameters can be successfully obtained after etching process to remove selectively AAO layer.