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6 J. Lee, "Optimiza-tion of gas flow and etch depth uniformity for plasma etching of large area GaAs wafers" 46 (46): 685-688, 2002
7 R. Olson, "Optimiza-tion of a Low Damage, High Resolution Etch Process for SiN x in an ECR Reactor" 143 (143): 288-292, 1996
8 L. Yang, "Multiple-attribute decision-making approach for an energy-efficient facility layout design" 66 (66): 795-807, 2013
9 J. R. Martins, "Multidisciplinary design optimization: A survey of architectures" 51 (51): 2049-2075, 2013
10 R. Thirumalai, "Multi-criteria decision making in the selection of machining parameters for Inconel 718" 대한기계학회 27 (27): 1109-1116, 2013
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