반사경 측정을 위한 타워 방식의 Fold Mirror를 이용한 Fizeau 간섭계 시스템 구성

다국어 초록 (Multilingual Abstract)

Fizeau interferometer is used for inspecting the lens surface profile accurately. This study is focused on the design and optical measuring techniques for Large optical components, such as a reflection mirror for large area lithography or astronomical purpose. A tower type Fizeau interferometer is designed and set up in horizontally with a 45° fold mirror which makes easy to align the optical path of heavy interferometer system. To align the optical path, a five-axes stage for the interferometer is required. This study shows a method of the 45° fold mirror alignment by using a three-axis stage instead of adjusting the interferometer itself or measuring object. This system will be installed on the large optics polishing machine during the manufacturing process as an on-machine inspection system.

참고문헌 (Reference)

1 김옥현, "대구경 렌즈의 형상 측정을 위한 Fizeau 간섭계 시스템 개발" 대한기계학회 30 (30): 1649-1657, 2006

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3 Kim, D. H., "Profile Measurement and Stabilization using Laser Interferometer" Chousun University 2004

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6 Kim, H. Y., "Accuracy Improvement of Fizeau Interferometer" KAIST 2001