임피던스 센서 제작을 위한 잉크젯 기반 IDE 패턴적층공정 최적화 연구 = A Study on Optimization of Inkjet-based IDE Pattern Process for Impedance Sensor

다국어 초록 (Multilingual Abstract)

At present, it is possible to manufacture electrodes down to several micrometers (~ μm) using inkjet printingtechnology owing to the development of precision ejection heads. Inkjet printing technology is also used in themanufacturing of bio-sensors, electronic sensors, and flexible displays. To reduce the difference between theelectrode design/simulation performance and actual printing pattern performance, it is necessary to analyze andoptimize the processable area of the ink material, which is a fluid. In this study, process optimization wasconducted to manufacture an IDE pattern and fabricate an impedance sensor. A total of 25 IDE patterns wereproduced, with five for each lamination process. Electrode line width and height changes were measured bystacking the designed IDE pattern with a nanoparticle-based conductive ink multilayer. Furthermore, the optimalprocess area for securing a performance close to the design result was analyzed through impedance andcapacitance. It was observed that the increase in the height of stack layer 4 was the lowest at 4.106%, and theincrease in capacitance was measured to be the highest at 44.08%. The proposed stacking process pattern, whichis optimized in terms of uniformity, reproducibility, and performance, can be efficiently applied tobio-applications such as biomaterial sensing with an impedance sensor.

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