32”대면적 V-형상 미세 패턴을 위한 초정밀 가공기술 개발

다국어 초록 (Multilingual Abstract)

High-accuracy micropatterns such as V-shaped microgrooves are increasingly in demand for various engineering areas. And the technical trend goes for large surface areas in precision machining technology. So micropatterns with large surface areas are expected to play an increasingly important role in today’s manufacturing technology. In this study, we focused on developing machining technologies. First, a machine vision system for precise tool setting is developed. Second, an on-machine measurement (OMM) system for large-area measurement is implemented. And also software for tool path generation and simulation is developed. With these technologies we fabricated large-surface micropatterns in an electroless nickel-plated workpiece with single-crystal diamond tools and a 32-in, ㎜ ㎜ 450 675 × mold with tens of V-and pyramid-shaped micropatterns.

참고문헌 (Reference)

1 Lee, B. K., "Replication of microlens arrays by injection molding" SPRINGER 10 (10): 531-535, 2004

2 Ghosh, A, "Performance evaluation of diamondtools for micro cutting of V-groove on electrolessnickel plated die materials" 135-138, 2007

3 Heeren, P, "Microstructuringof sillicon by electro-discharge machining(EDM)-part II:applications" 61 (61): 379-386, 1997

4 Rezaur Rahman, K. M, "Microgrooving onelectroless nickel plated materials using a singlecrystal diamond tool" 27 (27): 911-917, 2006

5 Li, Y., "Micro electrodischarge machine with an inchworm type of microfeed mechanism" 26 (26): 7-14, 2002

6 Kang, S. W, "Improvement ofthickness uniformity in nickel electroforming for theLIGA process" 40 (40): 1065-1072, 2000

7 Lim, H. S., "Improvement of Form Accuracy in HybridMachining of Microstructures" 31 (31): 1032-1038, 2002

8 Sawada, K, "Development of ultraprecision micro grooving" 43 (43): 170-176, 2000

9 Rahman, M. A., "CNC microturning:an application tominiaturization" 45 (45): 631-639, 2005

10 Malek, C. K, "Applications of LIGAtechnology to precision manufacturing of highaspect-ratio micro-components and-systems:areview" 35 (35): 131-143, 2004

11 Bertsch, A., "3Dmicrofabrication by combining microstereolithographyand thick resist UV lithography" 73 (73): 14-23, 1999