Application of Etchant Jet for Laser Micro-machining of Metal Channels

다국어 초록 (Multilingual Abstract)

A laser micromachining technique that employs etchant jet for thermochemical wet etching of metallic channels is
introduced. In this method, the etchant supplies chemicals for thermochemical reaction and laser beam delivered
through an optical fiber provides the thermal energy. For the generation of etchant jet, a nozzle with a gap control
function is utilized. By using this method, microchannels with a triangular cross-sectional profile and a depth
ranging from 100 to 300 μm and a width ranging from 100 to 200 μm are fabricated on stainless steel 304. Since
the etchant is supplied in the form of a liquid jet, it is expected that this technique can be applied for the
fabrication of microchannels on industry scale workpiece. The variation of channel size and shape with respect to
process parameters is examined. Also, the potential application to the fabrication of metallic microchannels with
high-aspect-ratio is investigated.

참고문헌 (Reference)

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