전기화학법에 의해 형성된 Ti 양극산화피막의 특성 = The Characteristics of Ti Anodic Oxide Films Formed by Electrochemical Method

다국어 초록 (Multilingual Abstract)

The effects of electrolyte concentration and current density on the behaviour of volt-time curve of the anodizing, morphology, roughness, crystallinity and composition of the oxide layer were studied. Microstructural morphology, crystallinity, composition and surface roughness of oxide layer were analyzed by observed by scanning electron microscopy(SEM) and X-ray diffractometry(XRD), Energy-dispersive spectrometer(EDS), Electron Probe Micro Analyzer(EPMA)and roughness tester, respectively. The results of this study showed that the voltage incresed as the anodizing time increase. The growth of the oxide film developed a barrier layer to a pore-like layer with an increasing of current density, arising a spark discharge. On the morphology of anodic oxide layer the number and size of porosity was increased by increasing anodizing time at a constant concentration of electrolyte. The size of porosity and the roughness of the anodic oxide layer were increased by the increasing of concentration of electrolyte. The anodic oxide layer obtained in the conditions of this experiment was identified as anatase. The crystallinity of oxide layer was decreased by increasing the concentration of electrolyte at constant current density, and increased by the increasing current density at constant electrolyte concentration. In the EPMA analysis of anodic oxide layer, the concentration of phosphorous was increasing the electrolyte concentration and increasing the final voltage at constant electrolyte concentration, The ratio of O/Ti of the oxide layer obtained in this experiment was near 2 confirming this oxide layer was TiO₂