An integrated MacheZehnder interferometric biosensor with a silicon oxynitride waveguide by plasma-enhanced chemical vapor deposition

다국어 초록 (Multilingual Abstract)

We report the design and fabrication of an integrated MacheZehnder interferometric (MZI) biochip based on silicon oxynitride layers deposited with a plasma-enhanced chemical vapor deposition (PECVD) process. A rib waveguide for an integrated MZI sensor has been designed to have a high surface sensitivity and a single-mode behavior by using an effective index method. The integrated MZI chip operating at 637 nm is fabricated via conventional photolithography and reactive ion etching. As a biosensor application, the real-time and label-free detection of the covalent immobilization and hybridization of DNA strands is performed and verified with this device.

참고문헌 (Reference)

1 B. Sepúlvedal, 8 : S561-s566, 2006

2 F. J. Blanco, 384 : 44-46, 2006

3 M. Sieger, 85 : 3050-3052, 2013

4 A. Ymeti, 7 : 394-397, 2007

5 K. Schmitt, 22 : 2591-2597, 2007

6 S. Bhattacharya, 14 : 590-597, 2005

7 S. P. Pogossian, 16 : 1851-1853, 1998

8 F. Dell’Olio, 15 : 4977-4993, 2007

9 S. J. Choo, 19 : 095007-, 2009

10 H. G. Tompkins, 17 : 391-397, 1999

11 H. Fujiwara, "Spectroscopic Ellipsometry: Principles and Applications" Wiley 170-172, 2007

12 추성중, "An Integrated Mach-Zehnder Interferometric Sensor Fabricated by Using Cr Mask Extension Lithography" 한국물리학회 60 (60): 744-749, 2012