식스 시그마 기법을 활용한 초소형 광픽업용 마이크로미러 어레이의 개발 = Development of Micromirror Array for Miniaturized Optical Pickup by Employing the Six Sigma Methodology

다국어 초록 (Multilingual Abstract)

Six Sigma methodologies can be used not only for quality control and solving the management problem of production lines, but also for research and development of novel products. In this paper, we describe the design and fabrication of micromirror array, which is essential for the implementation of micro-optical pickups for portable optical information storage devices using Six Sigma methodology. The DMAIC process was applied as a Six Sigma roadmap. The micromirror array was fabricated by wet anisotropic etching of a Si(100) wafer which was cut at an angle of 9.7° in the <110> crystal direction using a KOH solution and additional UV embossing using a precision glass master mold. The surface roughness of the polymer-coated micromirror was reduced to one eighth compared to the Si micromirror fabricated with wet etching only, satisfying the specifications of the micromirror for the optical pickup.

국문 초록 (Abstract)

식스 시그마 기법은 생산라인의 품질관리, 경영관리뿐만 아니라 연구개발에도 유용하게 적용할 수 있다. 본 논문에서는 식스 시그마 방법론을 활용하여 휴대형 광정보저장장치용 초소형 광픽업의 구현에 필수적인 마이크로미러의 설계 및 개발에 대하여 연구한 결과를 기술한다. 식스 시그마 방법론으로서는 일반적으로 사용되는 DMAIC 프로세스를 적용하였다. 마이크로미러는 <110> 결정 방향으로 9.7° 경사지게 절단된 Si(100) 기판을 KOH 용액을 사용한 습식 이방성 식각으로 45° 미러면을 제작하고, 광학수차 감소를 위하여 정밀 유리 마스터 몰드를 사용한 자외선 경화형 폴리머 엠보싱을 추가하여 표면 거칠기를 감소시켰다. 폴리머 층을 추가한 마이크로미러의 표면 거칠기는 습식 식각만 적용한 Si 마이크로미러에 대비하여 약 1/8로 감소하여 초소형 광픽업용 미러의 규격을 만족시켰다.

참고문헌 (Reference)

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