온도와 플라즈마가 CVD 장비의 과불소 오링 수명에 미치는 영향 분석

Chao, Huang Chi 충북대학교 산업대학원 2024 국내석사

The semiconductor industry has made great progress in recent decades and is being used as an essential part to play a role in data storage processing transmission such as smartphones, TVs, and computers that are indispensable in our daily lives. Among them, CVD (Chemical Vapor Deposition) technology supplies a thin film material to be formed on the substrate and performs chemical reaction by plasma on the surface of the substrate. However, due to temperature and plasma exposure, CVD equipments is damaged and leakage accidents occur frequently. Among them, the O-ring used to seal parts is important, and damage, leakage, and poor operation of the FFKM (Perfluoroelastomer) O-ring due to plasma exposure are leading to a decline in wafer quality, reduced productivity and safety issues. The purpose is to analyze and understand factors that affect life and performance to prevent productivity degradation and safety problems due to leakage or malfunction caused by damage to FFKM O-ring, one of the components used in high temperature environments and plasma conditions. We checked the physical changes of perfluorine O-ring due to temperature, such as weight, linear expansion rate, tensile strength, and permanent compression deformation, and confirmed how it affects performance. We checked the physical changes of the perfluorine ring due to plasma: weight, cross-sectional changes, tensile strength, and permanent compression deformation. When measuring weight changes due to temperature changes, perfluorine O-rings did not affect temperature, given that there was no change in weight and there was no significant difference in tensile strength and elongation. The change in the weight of perfluorine O-ring for plasma was found to have more surface etching of FFKM O-ring than O2 plasma for NF3 plasma. Depending on the exposure time to plasma, etching of the O-ring surface is also found to be worse, making the surface uneven and changing weight significantly. The linear expansion change of the perfluorine ring for plasma is also fine, but physical property changes are found to increase as the temperature rises. Experiments have shown that the tensile strength of perfluorine rings for plasma increases and the tensile rate decreases. The biggest change due to plasma is the change in weight, and managing the change in weight will make it easy to predict the life of perfluorine rings. To reduce O-ring etching on plasma, it can be used more effectively by making steps between O-rings to minimize the impact of plasma, or by inserting a Teflon plate that can withstand high temperatures and plasma during gas and plasma generation. These results will provide information to support material selection and component design depending on the environment in which FFKM O-ring, one of the components used in high temperature and plasma conditions, prevent physical human damage caused by gas and liquid leakage.

소형저수지 안정성 평가를 위한 여유고 산정

김현교 충북대학교 산업대학원 2025 국내석사

Due to the recent climate change, damages such as river levees and reservoir overflows, flooding of agricultural land, and landslides caused by typhoons and local heavy rains have frequently occurred. According to the 2022 Statistical Yearbook of Agricultural Production Base Maintenance (2023), 14,877 out of about 17,066 agricultural reservoirs have been built for more than over 50 years old, and it is unlikely to respond to rainfall events caused by recent abnormal climates. Four reservoirs with at least 30 years old of weather observation data were selected among small reservoirs located in Chungcheongbuk-do, and since there are differences in the observation timing of weather data for each observatory, this study selected a period from 1973 to 2023 (51 years) to compare and analyze the results during the same period. To calculate the design flood amounts, the K-HAS (KRC Hydrology & Hydrology Analysis System) provided by the Korea Rural Community Corporation (KRC) was utilized. Flood amounts were calculated, and reservoirs were tracked using this system. The appropriateness of the target reservoirs was examined based on changes in design flood amounts and reservoir tracking results according to the set period. As a result of analyzing the design flood increase/decrease rate by collecting meteorological data on the target reservoir of this study from 1973 to 2023 and classifying CASE into four categories, the largest increase rate was found in Satteo Reservoir Case 3 (-4.33%), Sojuk Reservoir Case 3 (23.77%), Neolakgol Reservoir Case 4 (15.18%), and Gojabae Reservoir Case 4 (72.58%). It can be seen that the rainfall is gradually increasing even considering the regional specificity. In addition, as a result of examining whether the height of the dam cest for each reservoir is adequate by performing flood tracking of the reservoir based on the design flood calculated to examine the hydrological stability of the target reservoir, it was confirmed that the dam cest height of the Satteo Reservoir Case 3 (-0.50m), Sojuk Reservoir Case 2 (-1.06m), Neolakgol Reservoir Case 4 (-0.53m), and Gojabae Reservoir Case 4 (-0.92m) were found to be the most insufficient. In all this study, the lack of height of the reservoir embankment due to changes in design standards and the increased precipitation is confirmed, and accordingly, measures and operational management measures need to be established to improve the hydrological stability of small reservoirs. Key words: Probability rainfall, aging reservoir, K-HAS, flood volume, dam cest, freeboard * A thesis for the degree of Master of Engineering in February 2025.

충북지역 건설산업의 구조분석을 통한 경쟁력 제고방안

박찬환 충북대학교 산업대학원 2001 국내석사

충북대학교 토목공학과 학생의 직업유형과 진로선택의 분석 : 홀랜드식 적성탐색검사

김미경 충북대학교 산업대학원 2012 국내석사

HOLLAND Career Search Inventory on job type and career was tested and analyzed with 4th year(60) students of civil engineering department, Chungbuk National University. The results of HOLLAND aptitude test have a distribution of Realistic type (41%), Social(23%), Enterprising(13%), Conventional(12%), Investigative(6%) and Artistic(5%), and 41% of the students(Realistic type) are suitable for civil engineering. After the analysis up to second code, 70% of the students were categorized in three types(Realistic, Social, Investigative types), which are essential requirements for civil engineering. This group of students could follows in general career program. The results also show that 55% of the students in the civil engineering department have high career identity, 37% average, and 8% low in terms of career identity. And 88% of the total students were above average in career maturity. According to the survey for the career selection among the students in civil engineering department, 73% of the students answered that they are preparing for that with a plan, but 42%, 33%, and 18% of the students answered that they can't prepare well with the resume, self-introduction letter, and interview respectively, which are essential for their career. And 63% of the students answered that they will get a job even thought the job is not related to their major. 49% of the students realize the difficult situation in getting a job currently, and 81% of the students answered that their professors are doing an important role in their finding a job. But in reality, the students are finding the information about the job through the Internet(44%), from their seniors or minors(32%), and from their professors(10%), which shows that active career counselling from the university and professors is necessary. Although more comprehensive analysis is difficult to achieve due to the limited number of students, this study figures out a group of students who need career counselling, and can provide a core data to the department of civil engineering which enable the department to provide a specified career advice to the students based on their personality.

IoT 시스템을 적용한 타이어 제조 공장 대기오염방지시설 운영

김종원 충북대학교 산업대학원 2025 국내석사

This study investigated the application of an IoT-based real-time monitoring system for managing air pollution control facilities in the tire manufacturing process. The facilities studied included a dust collector, wet scrubber, and exhaust fan, where IoT sensors were installed to monitor key parameters such as differential pressure, airflow, and power consumption. Additionally, a dashboard was developed to visualize real-time data, improving operational efficiency and enabling the early detection of anomalies. By utilizing the dashboard, operational risks in the coordination between the refining process and air pollution control facilities were proactively identified and addressed. This highlighted the importance of seamless integration between production processes and emission control systems. Furthermore, the durability and reliability of IoT devices were validated in real-world environments, such as Geumsan County, which is characterized by exposure to rubber fumes, high humidity, and temperature fluctuations. The application of a pulse pressure gauge to the dust collector's filter improved monitoring accuracy, allowing precise predictions of filter replacement timing and reduced compressed air consumption, contributing to cost savings and compliance with environmental regulations. These findings demonstrate that the IoT-based monitoring system significantly enhances the operational efficiency of air pollution control facilities while supporting cost reduction and compliance with environmental regulations, playing a vital role in advancing facility management.

첨단의료복합단지 정주환경 만족도 연구 : 충북 오송과 대구 신서를 중심으로

김경희 충북대학교 산업대학원 2016 국내석사

Many employees at the high-tech medical complexe reside in government-provided housing. These workers live at the complexes during weekdays and return to their family homes during weekends due to insufficient human settlement. This research aims to analyze the human settlement at the Osong BioHealth Science Technopolis in Chungbuk and Sinseo Innovation City in Daegu by conducting a survey on employees' level of satisfaction with their human settlement in order to suggest methods for improving human settlement based on user opinion. Five aspects were considered to form the basis of the human settlement: transportation, residence/safety, education, welfare/medical service and culture/ recreation. Data were collected on thirty seven facilities and their surrounding infrastructures with regard to the social environment and the high-tech medical complex. Also, the sitemap of the internet portal site Daum was used to analyze the human settlement. A Likert scale was used to measure the level of satisfaction with the human settlement. Chi-square testing was used to determine whether marital status affected the settlement satisfaction levels by studying the most satisfying and the least satisfying factors. In terms of the factors affecting satisfaction in settlement, the railroad network and administrative agencies were important in Osong Chungbuk, whereas in Sinseo Daegu, the factors were road and air networks, the police station and patrol division, the fire station and 119 emergency center, social welfare centers, hospitals, clinics, health centers, libraries, art galleries and museums. As for the factors in which marital status influenced the human settlement, these were museums in Osong Chungbuk and air network and houses, elementary schools, middle schools and museums in Sinseo Daegu. Transportation and resident safety were ranked as the first and second most important factors, respectively, influencing user satisfaction levels at both locations. The least important factor was culture/recreation at both locations. The second and third to the least influential factors at Osong Chungbuk were transportation and welfare/medical service, respectively, while at Sinseo Daegu these were welfare/ medical service and education. The reasons for dissatisfaction with human settlements were inadequate or insufficient availability of cultural venues, such as theaters, and poor medical infrastructure, such as hospitals, in both areas. Further reasons were insufficient transportation between Cheongju and Osong in Osong Chungbuk and lacking educational institutions and inadequate school districts in Sinseo Daegu. Participants in the survey suggested improving cultural infrastructures, providing transportation, building hospitals, stabilizing housing prices and building educational institutions. For Sinseo Daegu, reducing the noise level and the amount of fine dust surrounding the airport, building a fire station and expanding public physical-education centers, such as swimming pools, were recommended.

저압 모터제어반의 모듈형 분산제어시스템 설계

송인찬 충북대학교 산업대학원 2016 국내석사

Low-voltage Motor Control Center(MCC) to protect and control low-voltage motor of the factory in the power system is one of the most essential fields in the industrial facilities. It is recently the trend is being applied to miniaturization and multifunction technology. Also, to compensate shortcomings of the motor system, including monitoring, control and protection in a single integrated and centralized system, Distributed Control System(DCS) is required to be divided as several of the centralized system with separate the function into one centralized system. This compose the whole system to throughout the communications network by connecting a centralized system of each. Thus, in this study, low-voltage MCC produced wiring cost savings, reduced working time and to drastically reduce the costs to make a control panel, also, in order to use communication networks to enable to take control and monitoring of the motor remotely, by using I/O device built-in communication module and power module in general low-voltage MCC, suggesting application technology for the provision of the modular DCS of the low-voltage MCC. To present the application technology, the actually used to produce a housing according to a schematic diagram of a system was proved the effect on approximately 50% cost savings and two times increase of productivity. In addition, creating a table for the selected main unit by outputting the motor rating, users were easier access to these systems. 전력계통에서 일반 공장의 저압 모터를 보호, 제어하는 시스템인 저압모터 제어반은 산업설비 중에서 가장 핵심적인 부분 중에 하나로 최근에 요구되어 지는 소형화 및 다기능화에 적합하게 기술이 전환되고 있는 추세이며, 또한 모터의 감시, 제어, 보호 등을 하나로 집중화하여 관리하는 시스템의 단점인 높은 제작비용과 모터 적용 용량의 한계를 보완하기 위해서, 하나의 중앙처리 장치를 기능별로 분리하여 여러 개의 작은 중앙장치로 세분하고 각각의 시스템을 통신으로 네트워크를 연결하여 전체 시스템을 구성하는 분산제어시스템이 요구되고 있다. 따라서, 본 연구에서는 저압 모터제어반 제작시 배선비용 절감, 작업시간 단축 및 외함 비용을 대폭 절감하고, 상위 감시반에서 네트워크를 활용하여 원격으로 모터의 제어 및 모니터링이 가능하도록 하기 위해, 기존의 일반적인 저압 모터제어반에 I/O Device 내장형 통신 모듈과 파워모듈을 사용 함으로서, 저압모터제어반의 모듈형 분산제어시스템 제공을 위한 제어 방식을 제시하였다.

산업용 LNG 보일러실의 폭발위험장소 설정방안

안태진 충북대학교 산업대학원 2016 국내석사

Recently, there have been frequent domestic small and large accidents by explosions in petrochemical industry and at home and businesses using gases, causing extensive damage to properties and loss of life. Accidents by explosion, leading to big gas explosion or fire, are of increased social concerns. City gas, flammable gas, is a material that forms explosive atmosphere and causes explosion when released. It is used as fuel for boiler or heating furnace in the industrial world, and in the course of replacing diesel fuel used in the past. Electric machines and appliances installed inside a boiler room using city gas, subject to occupation safety and health acts, should be maintained by establishing explosion hazardous area and preparing classification map. Accordingly, through case studies based on KS C IEC 60079-10-1 and IP15, the extent of zone can be accurately determined by performing calculation process for explosion hazardous area classification. Electric facilities related to boiler should be installed explosion proof appropriate for the classification after establishing explosion hazardous area in accordance with standards set by occupation safety and health acts. Especially, it is desirable to apply reasonable explosion hazardous area calculation method due to routine excessive design of city gas facilities. It is concluded that it can be zoned as explosion non-hazardous area because the extent of zone, in establishing explosion hazardous area, was confined at less than 0.1m based on accident impact assessment using KS C IEC 60079-10-1 as a calculation formula, with less than 0.1m hypothetic volume. In industries requiring constant use of boiler steam, such as display and semiconductor process, boiler operation must be ceased when attempting to enhance facilities with general electric machines and appliances to those with explosion proof, within the extent of zone with explosion risk of LNG boiler room. In case of such interruption, extensive production damage is expected. In this study, we presented how to make enhancements using enclosed local exhaust while operating boiler. In establishing explosion hazardous area, KS C IEC 60079-10-1 has priority for application. If unable or insufficient to apply this, it is presumed that standards of other countries or organization cannot be utilized as normative references. We concluded that explosion hazardous area can be reasonable established without difficulties of setting release hole size at field if suggested values by both KS C IEC 60079-10-1 and IP15 are used.

推力 測定에 의한 産業用 Jet送風機의 流量 評價

정철영 충북대학교 산업대학원 2005 국내석사

이산화규소가 코팅된 산화아연 입자의 제조 및 자외선 차단 효과

김원종 충북대학교 산업대학원 2013 국내석사

Skin exposure to an appropriate amount of sunlight allows for vitamin D synthesis, thus strengthening the bones. However, excess exposure to sunlight can have a negative effect on the skin because of ultraviolet(UV) light. Recently, the destruction of the ozone layer has led to an increase in the amount of UV rays that reach the surface of the earth; and its negative effects such as corneal burn, cataract, and skin cancer have been widely discussed. Zinc oxide has a high refractive index and high UV light scattering; therefore, it is frequently used in sunscreen cosmetics. However, these cosmetics could have problems including grainy texture, white effect, and decreased photocatalytic activity caused by the high composition of inorganic powders such as zinc oxide. To overcome these regulations and develop a better sunscreen cosmetics, zinc oxide coated with fatty acids, amino acids, lecithin, silica, and alumina has been used. In this study, we aimed to develop a new composite powder to block UV rays that cause photoaging. We used micro sized zinc oxide, widely used in the cosmetics industry, coated with silica, frequently used for industrial purposes using sodium silicate. Hydrothermal method with sodium silicate and acid hydrolysis were used to coated silica. The process variables for the production of silica coated zinc oxide included the type of acid catalyst, pH, molar ratio of zinc and silicon, volume of solvent, reaction temperature, and reaction time. The physical and chemical properties of silica coated zinc oxide particles were analyzed by XRD, FT-IR, XPS, EDS, SEM and PSA. Furthermore, we assessed the UV protection effect of the composite powder using UV-Vis and In-vitro test. We subjected the newly produced composite powder to user test to determine the advantages for practical use of this powder as a cosmetics, comparing with uncoated zinc oxide. The results show that the composite powder has a high UV protection effect, sensory feeling, adhension feeling, and spreadability for use in cosmetics.