http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Multidisciplinary optimization of etch process chamber on the basis of MCDM
Wenrui Duan,Ling Tian,Zhansong Wang,Wenbin Han 대한기계학회 2014 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.28 No.11
A multidisciplinary optimization integrating flow and plasma performance was used to develop an etch process chamber with dualfrequencycapacitively coupled plasma. Pressure and ion density characteristics are significantly influenced by structures, such as electrodegap, number of confinement rings, electrode radius, and process conditions of flow rate. This study aims to minimize the objectivefunctions of pressure and ion density simultaneously. Based on flow and plasma simulation, an approximation model is created usingquartic response surface method (RSM). A genetic algorithm was utilized to explore Pareto front. The concept of entropy weight is combinedwith the weight defined in analytic hierarchy process to create a synthetic weight over the objectives. The non-dominated solutionsare ranked by the modified technique for order preference by similarity to ideal solution. The ranking list helps arrive at rational decisionsand provide a unique solution. The optimum structure of the chamber is obtained and the final solution is discussed. The proposed optimizationframework improves the distribution profile of pressure and ion density.
Xiaoqing Lin,Renjie Li,Qingshi Wen,Jinglan Wu,Jiansheng Fan,Xiaohong Jin,Wenbin Qian,Dong Liu,Xiaochun Chen,Yong Chen,Jingjing Xie,Jianxin Bai,Han-Jie Ying 한국생물공학회 2013 Biotechnology and Bioprocess Engineering Vol.18 No.2
Removal of biobutanol from acetone-butanolethanol (ABE) fermentation broth can be achieved by fixed-bed sorption by means of KA-I resin, and the relevant breakthrough curves would provide much valuable information to help design a continuous fixed-bed sorption process in field application. In the present study, the effects of several important design parameters, i.e., initial butanol concentration (Cf: 3.0 ~ 30.0 g/L), inlet flow rate (Qf: 0.5~ 5.5 mL/min) and adsorbent bed height (Z: 4.2 ~ 18.0 cm),on the adsorption breakthrough curves of KA-I resin in a fixed-bed column were investigated. It was found that the amount of adsorbed butanol at breakthrough point was increased with an increase in the value of Cf and Z; and with decrease in the value of Qf. However, the maximum sorption capacities of butanol at saturated point were basically unchanged. Three well-established fixed-bed adsorption models, namely Thomas, Yoon-Nelson and Adams-Bohart,were applied to predict the breakthrough curves and to determine the characteristic parameters of fixed-bed column,which are the basis for the process design at a real scale. Good agreement between the theoretical breakthrough curves and the experimental result were observed using Thomas and Yoon-Nelson models.