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HWE 방법에 의한 CdSe 박막 성장과 광전기적 특성
신영진,홍광준,이상열,유상하,서상석,문종대,김택성,정태수,신용진,이관교,김혜숙,정준우,정경아 한국센서학회 1997 센서학회지 Vol.6 No.4
The CdSe thin films were grown on the Si(100) wafers by a hot wall epitaxy method (HWE). The source and substrate temperature are 600� and 430 respectively. The crystalline structure of epilayers was investigated by double crystal X-ray diffraction(DCXD). Hall effect on the sample was measured by the van der Pauw method and studied on the carrier density and mobility dependence on temperature. From Hall data, the mobility was increased in the temperature range 30K to 150K by impurity scattering and decreased in the temperature range 150K to 293K by the lattice scattering. In order to explore the applicability as a photoconductive cell, we measured the sensitivity(γ), the ratio of photocurrent to darkcurrent(pc/dc), maximum allowable power dissipation(MAPD), spectral response and response time. The results indicated that the photoconductive characteristic were the best for the samples annealed in Cu vapor compare with in Cd, Se, air and vacuum vapour. Then we obtained the sensitivity of 0.99, the value of pc/dc of 1.39 X 10^7, the MAPD of 335mW, and the rise and decay time of l0ms and 9.5ms, respectively
Chemical Bath Deposition 방법으로 제작한 CdSe 박마의 특성
신영진,홍광준,이상열,유상하,서상석,문종대,신현길,김택성,송정훈,유기수,정태수 한국센서학회 1993 센서학회지 Vol.2 No.1
Polycrystalline CdSe thin films were grown on ceramic substrate using a chemical bath deposition (CBD) method. They were annealed at various temperature and X-ray diffraction patterns were measured by X-ray diffractometer in order to study CdSe polycrystal structure. Using extrapolation method of X-ray diffraction patterns for the CdSe samples annealed in N₂ gas at 450℃ it was found hexagonal structure whose lattice parameters a_o and c_o were 4.302 A and 7.014 A, respectively. Its grain size was about 0.3 ㎛. Hall effect on this sample was measured by Van der Pauw method and studied on carrier density and mobility depending on temperature. From Hall data, the mobility was likely to be decreased by piezo electric scattering at temperature range of 33 K and 200 K, and by polar optical scattering at temperature range of 200 K and 293 K. We measured also spectral response, sensitivity (γ), maximum allowable power dissipation and response time on these samples.
신영진,신현길,김택성,유기수,정태수,유평열,정철훈,이훈,신영신,홍관준 한국센서학회 1993 센서학회지 Vol.2 No.1
A CdS single crystal was grown by using sublimation method. Lattice constants, a_o and c_o, obtained by using extrapolation were 4.1318 Å and 6.7122 Å, respectively. The carrier density was ∼10^(23) m^(-3) and the mobility was 2.93X10^(-2) ㎡/V-sec from measured Hall data at room temperature. The mobility has a increasing tendency in proportion to T^½ from 33 K to 150 K and a decreasing tendency in proportion to T^(-2) from 180 K to room temperature. The short wavelength band peak measured from photocurrent was due to intrinsic transition, and the energy value of this peak was equal to the energy band gap of CdS photoconductor.
늑막조직생검으로 진단한 Pleural Paragonimiasis 1 예
김기영,이승환,박진현,이재갑,용석중,신계철,홍욱균,김향인,진춘조 대한내과학회 1991 대한내과학회지 Vol.40 No.5
We report a 28-year old female patient with pleural paragonimiasis who did not have the usual diagnostic triad for this parasitic disease. She did not have chronic hemoptysis, there were no pulmonary infiltrations, and stool, sputum and pleural fluid examinations did not yield paragonimus ova. The diagnosis was made on the basis of ova found in the pleural biopsy. Paragonimus pleural effusion was resolved with frequent thoracentesis and oral praziquantel therapy.
김현수,이상수,오미희,이재갑,원구태,홍희승,용석중,신계철 대한내과학회 1991 대한내과학회지 Vol.40 No.4
The lung is the most common site of metastasis of extrapulmonary malignant tumor. According to past reports, metastatic cancer of the lung has been found in about 2% of all patients at autopsy. But these days, a diagnosis of endobronchial metastatic cancer utilizing bronchoscopy only is not easy. Thus we need other means of gathering more informaction, such as past history, discovery of other metastatic sites, and pathologic findings with special staining and electronmicroscope, especially in cases of poorly differentiated adenocarcinoma and epidermoid cancer, which are common types of primary lung cancer. We present 5 cases of endobronchial metastatic cancer. We found endobronchial metastatic cancer 2 cases of cervix cancer (epidermoid, adenocarcinoma), 1 case of colon cancer (adenocarcinoma), hypernephroma (renal cell carcinoma), and bladder cancer (transitional cell carcinoma). Since it was impossiole to diagnose the metastatic adenocarcinoma from the cervix only with lightmicroscopic findings, we could use past history and unusual radiologic and bronchoscopic findings which was thought to be the specific endoscopic finding of metastic endobronchial cancer. The interval between the diagnosis of the primary cancer and endobronchial metastatic cancer was 25.7 months. In the future, development of immunohistochemistry, monoclonal antibody, and molecular biologic techniques will give us diagnostic clue for differential diagnosis of metastatic endobronchial cancer from primary bronchogenic lung cancer.
문종대,정태수,신현길,김택성,이충일,홍광준,이상열,서상석,신용진,김혜숙,윤은희,김승욱,전승룡,유상하,이관교,박향숙,신영진 한국센서학회 1995 센서학회지 Vol.4 No.3
Polycrystalline Cd_(1-x)Zn_xS thin film were grown on slide glass(corning-2948) substrate using a chemical bath deposition (C.B.D) method. They were annealed at various temperature and X-ray diffraction patterns were measured by X-ray diffractometor in order to study Cd_(1-x)Zn_xS polycrystal structure using extrapolation method of X-ray diffraction patterns for the CdS, ZnS sample annealed in N₂ gas at 550 ℃. It was found hexagonal structure which had the lattice constant a_o = 4.1364Å, c_o=6.7129Å in CdS and a_o = 3.8062Å, c_o = 6.2681 Å in ZnS, respectively. Hall effect on these sample was measured by Van der Pauw method and then studied on carrier density and mobility depending on temperature. We measured also spectral response, sensitivity maximum allowable power dissipation and response time on these sample
CBD 방법에 의한 CdS1-xSex 박마의 열처리에 따른 광전기적 특성
문종대,정태수,신현길,김택성,신영진,홍광준,유상하,서상석,최승평,이상열,신용진,이관교,김혜숙,윤은희,김승욱,전승룡 한국센서학회 1995 센서학회지 Vol.4 No.1
Polycrystalline CdS_(1-x)Se_x, thin films were grown on ceramic substrate using a chemical bath deposition method. They ere annealed at various temperature and X-ray diffraction patterns were measured by X-ray diffractometer in order to study CdS_(1-x)Se_x, polycrystal structure using extrapolation method of X-ray diffraction patterns for the CdS. CdSe samples annealed in gas at a 0 it was found hexagonal structure which had the lattice constant a_0=-4.1364Å, c_0=6.7129Å in CdS and a_0=4.3021Å, c_0=7.3021Å in CdSe. respectively. Hall effect on these samples was measured by Van der Pauw method and then studied on carrier density and mobility depending on temperature. We measured also spectral response, sensitivity(γ), maximum allowable power dissipation and response time on these samples.
마이크로 공진 구조체 제작을 위한 다층 폴리실리콘의 스트레스 특성
손병기,장원익,최창억,이창승,홍윤식,이종현 한국센서학회 1999 센서학회지 Vol.8 No.1
Micro polysilicon actuators, which are widely used in the field of MEMS (Microelectromechanical System) technology, were fabricated using polysilicon thin layers. Polysilicon deposition were carried out to have symmetrical layer structures with a LPCVD (Low Pressure Chemical Vapor Deposition) system, and we have measured physical characteristics by micro test patterns, such as bridges and cantilevers to verify minimal mechanical stress and stress gradient in the polysilicon layers according to the methods of mutilayer deposition, doping, and thermal treatment, also, analyzed the properties of each specimen, which have a different process condition, by XRD, and SIMS etc.. Finally, the fabricated planar polysilicon resonator, symmetrically stacked to 6.5㎛ thickness, showed Q of 1270 and oscillation ampitude of 5㎛ under DC 15V, AC 0.05V, and 1000 mtorr pressure. The developed micro polysilicon resonator can be utilized to micro gyroscope and accelerometor sensor.