http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
Electron beam patterning with Vertically Aligned CNTs (C-beam) for next generation lithography
Alfi Rodiansyah,Kyu Chang Park 한국진공학회 2021 한국진공학회 학술발표회초록집 Vol.2021 No.2
Lithography is an important technique that has been widely used in micro-nano electronics. ln this study, we demonstrated vertically aligned carbon nanotube emitters (C-beam) as electron beam lithography to prepare patterns into the self-assembled monolayers (SAMs) on silicon substrate. Herein, we accomplished the C-beam diode technique to make patterns on Octadecyl trichlorosilane (OTS) as SAMs that coated on silicon substrate. We used 0.01 mA as current exposure with the 20 s time exposure. We conducted the water contact angle measurement to investigate the surface changing on the OTS. We found that there are reduction of water contact angle of OTS after exposure by C-beam. The water contact angle changed from 104.9o (as deposited OTS) to 62.9o after exposure by C-beam. Furthermore, after exposure, the silicon patterns generated by wet etching used KOH. The effect of electron bombarded into SAMs has made some opening site that made some patterns appears after silicon etching. By this accomplishment, we can consider to utilize C-beam as new generation for electron beam lithography.
Far UVC light for E. coli disinfection generated by carbon nanotube cold cathode and sapphire anode
유성태,이재윤,Rodiansyah Alfi,윤태영,박규창 한국물리학회 2021 Current Applied Physics Vol.28 No.-
Ultraviolet germicidal irradiation (UVGI) is an effective technique that can sterilize bacteria and viruses by UV light. Far UVC lamps of short wavelengths can prevent infectious diseases because they sterilize while minimizing cell damage in mammals. Here, E. coli inactivation by far UVC light with peak wavelength of 230 nm made of carbon nanotube (CNT) emitters and sapphire anode was studied. The κ-Al2O3 phase of sapphire with a direct band gap of 5.4 eV was excited with CNT-based cold cathode electron beam (C-beam) to generate far UVC light. It was confirmed that the inactivation of E. coli by far UVC light based on the C-beam was reduced by 5 log reduction within 60 s.