황구침법(黃丘鍼法)을 이용한 고혈압 환자의 혈압강하 효과에 대한 증례보고

한창현 ( Chang Hyun Han ),황치원 ( Chi Won Hwang ),신미숙 ( Min Suk Shin ),신선화 ( Seon Hwa Shin ),최선미 ( Sun Mi Choi ) 대한경락경혈학회 2006 Korean Journal of Acupuncture Vol.23 No.3

Objectives: The aim of the study was to investigate the antihypertensive effect of Hwang-gu Acupuncture in hypertensive patients. Methods: We measured the blood pressure of the patients who were admitted in the Oriental Medical Clinic of Brother from 25th November 2005 to 27th March 2006. We included the patients only in case of the systolic blood pressure was over 140mmHg or diastolic blood pressure was over 90mmHg, Twenty two patients were treated by Hwang-gu Acupuncture. In order to evaluate the effect of the Hwang-gu Acupuncture, the blood pressure was measured before and after Acupuncture procedure total 4 times, 10times. Results: There were a significant decrease in the systolic blood pressure and significant decrease in the diastolic blood pressure by Hwang-gu Acupuncture 4 times. The effect of Hwang-gu Acupuncture by measurement time on blood pressure were follows: In a systolic blood pressure was gradually deceased significantly from 1st to 4th but diastolic blood pressure was significantly decreased after 2nd and 4th only. Conclusions: These results suggest that Hwang-gu Acupuncture is effective in decreasing the systolic and diastolic blood pressure.

Development of Simultaneous Analytical Method for ImidazolinoneHerbicides from Livestock using LC-MSMS

Hyo-Min Heo,Hyeong-WookJo,Kyu-Won Hwang,Jung-Hun Sun,Joon-Kwan Moon 한국농약과학회 2021 한국농약과학회 학술발표대회 논문집 Vol.2021 No.11

Simultaneous analytical method using LC/MSMS for imidazolinone herbicides from livestock (egg, milk, beef, pork and chicken) for monitoring was developed with QuEChERS preparation. Sample weighing (5g) in a 50mL conical tube, added 0.1 M potassium phosphate dibasic solution (5mL) was shaken for 10min. After 0.5mL 6 NHCl, 10mL acetonitrile were added, it was shaken for 10min. And QuEChERS extraction salt (Original method, 4g MgSO₄, 1g NaCl) were added to the sample in the 50 mL conical tube. The mixture was strongly shaken for 1 min and was centrifuged at 3,000g for 10 min. The acetonitrile layer was purification with dSPE (150mg MgSO₄, 25mg C18) and was centrifuged at 13,000g for 5min. The supernatant was filtered with a membrane filters (pore size: 0.2um) before analysis. ME (%, Matrix effect) for almost analytes range were -6.56 to 5.70%. MLOD (Method LOD) and MLOQ (Method LOQ) was calculated by S/N ratio. MLOQs were 0.01 mg/kg. The linear correlation coefficients (r2) were > 0.99 within the range of 2 ~ 100 ug/kg for all of the 3 imidazolinone herbicides. The percentages (of imidazolinone herbicides) recovers were in the range of 84.1 ~ 110.6% (0.01mg/kg level), 90.8 ~ 97.1% (0.1mg/kg level) and 94.4 ~ 102.1% (0.5mg/kg level) within the validation criteria (recover; 70-120% with RSD < 20%)

팽이버섯 재배 현장에서 Listeria monocytogenes의 성장을 억제하기 위한 살균 처리 기술 개발

박경민,이수빈,정도영,최송이,황인준,김세리,Kyung Min Park,Su-Bin Lee,Do-Young Jung,Song-Yi Choi,Injun Hwang,Se-Ri Kim 한국식품위생안전성학회 2023 한국식품위생안전성학회지 Vol.38 No.6

본 연구는 팽이버섯 생산현장에서 사용하는 권지 접착포에서 팽이버섯으로 Listeria monocytogenes 교차오염을 예방하기 위하여 화학적 살균제에 의한 L. monocytogenes 저감 효과를 확인하였다. 과산화초산, 미산성전해수, 이산화염소수, 차아염소산나트륨을 10분간 처리했을 때 권지표면에 부착된 L. monocytogenes를 최대 99.99% 이상 저감화시켰고, 이들 4종의 살균소독제는 팽이버섯 유기물 존재 여부에 관계없이 높은 살균능을 보이므로 권지의 세척소독에 활용가능성이 있음을 확인하였다. 특히 과산화초산은 권지 접착포 거친면과 부드러운면 모두에서 L. monocytogenes를 99.999% 이상 감소시킬 수 있으므로 팽이버섯 권지 세척시 30mg/L 이상의 과산화초산에 30분 이상 침지한 후 사용하면 권지에 오염된 L. monocytogenes의 교차오염을 예방할 수 있을것으로 사료된다. The consumption of enoki mushrooms has been associated with cases of listeriosis produced by Listeria monocytogenes, highlighting the significance of sanitizing food-contact surface, such as the velcro used in welding processing of enoki mushrooms, to ensure microbial safety. We investigated the inhibitory activity of nine chemical disinfectants at regular concentrations against L. monocytogenes isolated from a mushroom farm environment. The bacterial suspension was prepared in phosphate buffered saline and mushroom extract broth and inoculated onto the velcro surface. After inoculation, most disinfectants reduced the initial 8 log CFU/coupon concentration by less than 2 log CFU/coupon during a 5-min treatment. Slightly acidic hypochlorous water showed a reduction of approximately 4 log CFU/coupon when tested for more than 30 min at the maximum allowable concentration of 200 mg/L. Sodium hypochlorite solution showed a reduction of approximately 5 log CFU/coupon when used at 100 mg/L for 60 min. Peracetic acid, at the maximum allowable concentration of 300 mg/L, showed the most effective reduction of 5 log CFU/coupon or more when the surface was treated with 37.5 mg/L for 30 min. These results indicate that peracetic acid can be used as the disinfectant strategy to control cross-contamination of L. monocytogenes on the velcro surface of plastic wrappers used in the welding processing of enoki mushrooms.

다양한 전처리 방법에 따른 양파의 이화학 및 영양학적 특성 분석

김광일 ( Kwang Il Kim ),황인국 ( In Guk Hwang ),유선미 ( Seon Mi Yu ),민상기 ( Sang Gi Min ),이상윤 ( Sang Yoon Lee ),최미정 ( Mi Jung Cho ) 한국산업식품공학회 2014 산업 식품공학 Vol.18 No.4

본 연구는 양파를 열처리 법 중에서 열수침지, 증기 및 볶음 처리에 따른 이화학적 및 영양학적 특성을 분석한 논문으로 열처리가 양파에 미치는 영향을 비교하고자 하였다. 상품을 구매할 때 1차적인 구매요소인 색도 및 경도측정과 추가적으로 pH와 조직관찰 결과로 최적조건 선정 후 영양학적 및 미생물 검사를 실시하였다. 열처리를 하지 않은 대조구에 비해 짧은 시간의 열처리에서는 더 진하고 선명한 색을 띠었으나, 장시간동안 처리한 열처리 시료는 색의 침착을 보였다. 원물과 처리구의 색은 열처리 시간에 따라 뚜렷한 차이를 나타냈고, 경도는 열처리 시간에 따라 짧은 시간에서는 분해효소의 불활성화로 유지 및 증가했지만, 3분 이상 처리하였을 때는 감소 경향을 나타냈고, 볶음처리는 짧은 시간으로도 물성이 연화됐다. 비타민은 열수 및 증기처리 1~2분 처리는 14% 정도 감소했지만 그 이상 처리 시에는 23~28% 범위로 큰 감소율을 보였으며, 유리당 및 유기산의 경우 열수침지 및 증기처리에서 손실을 보였지만, 볶음처리에서는 유지하거나 증가하는 경향을 나타냈다. 특히 유리당에서 열수침지 처리 시 높은 감소율을 나타냈다. Peroxidase activity 변화는 모든 처리구에서 75% 이상의 불활성화를 나타냈고, 특히 열수침지 및 증기 처리한 모든 시료에서 90% 이상의 불활성화를 나타내며 볶음처리보다 높은 불활성화율을 보였다. 미생물 측정한 결과 열수 침지 3분 이상 및 볶음처리 210초 이상 처리시 미생물 검출이 안됐으며, 증기처리 시료는 2분 처리만으로 사멸된 것을 관찰했다. 양파의 열처리 조건은 증기처리법으로 2분 동안 처리하는 것이 다른 처리법에서 처리한 시간들에 비해 최적으로 나타났다. 열처리 방법 별 각각의 최적 처리 시간을 가지고 있어, 높은 효율성이나 산업적으로 이용하려면 최적의 전처리 방법과 처리 시간을 산정하는 것이 중요하다. The pre-thermal treatment, or blanching, is an important process to minimize quality changes during main cooking or storage. In this study, three types of pre-thermal treatments were applied to onions to observe quality changes in their physicochemical, nutritional, and microbial properties. The washed and sliced onions were treated by hot-water immersion (100oC, 1~10 min), steaming (100oC, 1~10 min) and stir-frying with oil (180oC, 10~80 sec). The onions were cooled and wiped with gauze. The results showed that the total color difference of the treated sample increased to 18-23 units compared to that of the fresh control. The pH value of the onion was not significantly different with the exception of the stir-fried samples. The hardness of the onion tended to decrease depending on the treatment time. The micro-structures of onions treated by hot-water immersion and steaming were damaged above 2 min whereas stir-fried onions showed structural damage above 210 sec. In the analysis of the nutritional changes in the onion, the ascorbic acid content of the blanched treatments were lower than that of fresh onion and the free sugar contests showed a similar pattern excluding the stir-fried onions. In the organic acid content assay, the succinic acid content of the treated onion sample had significantly decreased compared with other organic acid contents (p<0.05). The peroxidase activities of the blanched treatments by hot-water immersion and steaming were inactivated by more than 92%, whereas only 76% inactivity was achieved by the stir-frying treatment. The mesophilic and psychrotrophic bacteria counts of the treated onion were not detected or decreased to near a 3-log scale, and yeast was detected only the sample treated by the stir-frying for 1 min. In particular, neither bacteria nor yeast counts in all onion samples by steam treatment were detected. Consequently, the results demonstrated that steam treatment for 2 min could be the optimal pre-thermal condition for onions to minimize the quality changes and increase safety.

배지의 종류와 부피가 절화 장미 ‘Red Sandra’와 ‘Little Marble’ 삽목시 발근 및 생장에 미치는 영향

정종운(Jong Woon Jeong),김경희(Gyeong Hee Kim),황승재(Seung Jae Hwang),박수민(Su Min Park),정병룡(Byoung Ryong Jeong) (사)한국생물환경조절학회 2007 생물환경조절학회지 Vol.16 No.4

본 연구는 배지의 종류 및 부피가 절화 장미의 발근과 발근 후 생육에 미치는 영향을 알아보기 위하여 수행하였다. 실험은 유리온실의 철재 베드에 높이 1.5m의 아치형 터널을 설치하고 습도유지를 위하여 fog(200sec./5min. or 100sec./5min) 가습하고, 삽목 초기에 차광률 55%의 한랭살 차광하였다. 실험재료는 Rosa hybrida ‘Red Sandra’와 ‘Little Mable’ 두 품종을 사용하였다. 배지의 종류에 따른 발근 차이를 알아보기 위하여 10가지 배지(토실이 상토, 암면큐브, peatmoss 1:1, perlite와 coir 1;1, perlite와 rockwool 1;1, rockwool과 peatmoss 1;1, rockwool과 coir 1;1, v/v)를 준비하여 삽목하였다. 발근배지의 부피에 따른 발근 및 생육의 차이를 알아보기 위하여 3가지의 배지(토실이 상토, 암면큐브, phenolic foam)를 각각 3가지 부피(3×3×3㎝, 5×5×5㎝, 7×7×7㎝)에 삽목하였다. 배지의 종류를 달리한 실험은 두 품종 모두에서 Rockwool l: Peatmoss l 배지에서 발근과 생육에서 가장 좋은 결과가 나타났으며, 배지의 부피에 따라 발근율과 모든 생육은 배지의 용적이 커질수록 좋았다. Experiments were conducted to measure rooting and growth of rose cuttings as affected by medium composition and volume. Rosa hybrid a ‘Red Sandra’ and ‘Little Marble’ were used as test plants. For medium composition test, rockwool, phenolic foam, perlite, vermiculite, peatmoss, coir and a commercial (Tosilee medium) were applied in single or mixed forms on the propagation bed with fog (200 sec./5 min.) installed to control the humidification time. ‘Red Sandra’ and ‘Little Marble’ cuttings were planted in 16-cell plastic pots and 72-cell plug trays, respectively. For the medium volume test, 72-cell plug trays and 16-cell or 9-cell plastic pots were used. Cuttings with an uniform node with a five-leaflet leaf was soaked in a 500 ㎎ㆍ L ?¹ IBA solution for 30 sec. A fogging system installed on the propagation bed was used for (100 sec./5 min.) Rockwool l : peatmoss l (v/v) was the most effective on growth and rooting for both cultivars and high volume of Tosilee medium and rockwool were most effective media for both cultivars.

열처리 방법에 따른 표고버섯의 이화학적 특성 및 영양학적 분석

이중규(Jung-Gyu Lee),김광일(Kwang-Il Kim),황인국(In-Guk Hwang),유선미(Seon-Mi Yoo),민상기(Sang-Gi Min),최미정(Mi-Jung Choi) 한국식품영양과학회 2015 한국식품영양과학회지 Vol.44 No.6

본 연구는 열수 침지, 증기 및 볶음 처리가 표고버섯에 미치는 이화학적 분석 및 영양성분 분석을 통해 최적 열처리 조건을 확립하고자 진행하였다. 소비자들이 상품을 평가할 때 1차적으로 먼저 관찰되는 색도와 경도를 측정하고 추가로 pH 측정 등으로 인한 이화학적 결과로 최적 조건을 선정한 뒤에 그 조건들에 대해서 영양학적 및 미생물 검사를 실시하였다. 색도는 열처리 시간이 길어질수록 색의 변색 정도가 증가하여 뚜렷한 차이를 나타내었다. pH 값은 열수 침지 처리의 경우 pH 증가량이 가장 높았으며 처리 시간이 지속될수록 pH가 증가하는 경향을 나타내었다. 다른 처리군의 경우 일정 시간의 처리 시간 이후에는 유의적인 차이를 보이지 않았다. 경도에서는 열수 침지와 볶음 처리의 경우 1분 이내의 열처리만으로도 경도가 감소하는 경향을 보였으며, 증기처리의 경우 1분 동안 경도가 유지되는 결과를 보였다. 일반성분 분석 결과는 증기 처리가 가장 원물에 가까운 결과를 나타냈다. 유기산 함량은 증기 처리에서 유기산 함량 감소율이 가장 낮았다. 또한 3분간 증기 처리를 하였을 때 미생물의 사멸 효과가 가장 높았다. 열수 침지 처리나 볶음 처리의 경우 전체적으로 증기 처리한 시료에 비해서 영양성분 함량이 줄어드는 경향을 나타냈다. 따라서 표고버섯을 증기 처리방법으로 열처리하는 것이 다른 열처리군에 비해서 최적으로 나타났다. 하지만 본 연구에서는 물리화학 및 영양학적 성분의 변화만을 분석하였기 때문에 실제 식품 산업이나 공정에 적용하기 위해서는 대용량 처리 시에 발생하는 문제들과 관련된 추가적인 연구를 필요로 할 것이다. In the food industry, thermal treatment is an important process for extending shelf-life of foods. However, heating process affects the physicochemical, nutritional, and microbial properties of foodstuff such as color, texture, pH, and proximate compositions. This study was conducted to select an optimal thermal treatment by observing physicochemical, nutritional, and microbial effects of shiitake mushrooms with different thermal treatment methods. Shiitake mushrooms were washed and sliced equally (5 cm×0.5 cm×0.5 cm) and then heat-treated by three methods. Samples were heated in 100°C boiling water, steamed for 10 min, or pan fried at 130°C for 4 min. Total color difference values showed significantly increasing tendency with treatment time. For pH values, boiling water-treated mushrooms showed increasing tendency according to increased thermal treatment. For the results of hardness, boiling water or pan frying-treated mushrooms showed reduced tendency within 1 min. In the case of steam-treated mushrooms, hardness values were maintained for 1 min. Organic acid contents of steam-treated sample showed the lowest value among treatments. For microbial counts, steam-treated samples for 3 min showed the lowest value. Consequently, the results of this study suggest that steam treatment could be the optimal thermal treatment to minimize quality loss of shiitake mushrooms.

배지의 종류와 부피가 절화 장미 ‘Red Sandra’와 ‘Little Marble’ 삽목시 발근 및 생장에 미치는 영향

정종운(Jong Woon Jeong),김경희(Gyeong Hee Kim),황승재(Seung Jae Hwang),박수민(Su Min Park),정병룡(Byoung Ryong Jeong) (사)한국생물환경조절학회 2005 생물환경조절학회지 Vol.14 No.2

본 연구는 배지의 종류 및 부피가 절화 장미의 발근과 발근 후 생육에 미치는 영향을 알아보기 위하여 수행하였다. 실험은 유리온실의 철재 베드에 높이 1.5m의 아치형 터널을 설치하고 습도유지를 위하여 fog(200sec./5min. or 100sec./5min) 가습하고, 삽목초기에 차광률 55%의 한랭사로 차광하였다. 실험재료는 Rosa hybrida ‘Red Sandra’와 ‘Little Marble' 두 품종을 사용하였다. 배지의 종류에 따른 발근 차이를 알아보기 위하여 10가지 배지(토실이 상토, 암면큐브, phenolic foam, perlite, vermiculite, 또는 perlite와 peatmoss 1 : 1, perlite와 coir 1 : 1, perlite와 rockwool 1 : 1, rockwool과 peatmoss 1 : 1, rockwool과 coir 1 : 1, v/v)를 준비하여 삽목하였다. 발근배지의 부피에 따른 발근 및 생육의 차이를 알아보기 위하여 3가지의 배지(토실이 상토, 암면큐브, phenolic foam)를 각각 3가지 부피(3 × 3 × 3cm, 5 × 5 × 5cm, 7 × 7 × 7cm)에 삽목하였다. 배지의 종류를 달리한 실험은 두 품종 모두에서 Rockwool 1: Peatmoss 1 배지에서 발근과 생육에서 가장 좋은 결과가 나타났으며, 배지의 부피에 따른 발근율과 모든 생육은 배지의 용적이 커질수록 좋았다. Experiments were conducted to measure rooting and growth of rose cuttings as affected by medium composition and volume. Rosa hybrid a 'Red Sandra' and 'Little Marble' were used as test plants. For medium composition test, rockwool, phenolic foam, perlite, vermiculite, peatmoss, coir and a commercial medium (Tosilee medium) were applied in single or mixed forms on the propagation bed with fog (200 sec./5 min.) installed to control the humidification time. 'Red Sandra' and 'Little Marble' cuttings were planted in 16-cell plastic pots and 72-cell plug trays, respectively. For the medium volume test, 72-cell plug trays and 16-cell or 9-cell plastic pots were used. Cuttings with an uniform node with a five-leaflet leaf was soaked in a 500 ㎎ㆍL?¹ IBA solution for 30 sec. A fogging system installed on the propagation bed was used for (100 sec./5 min.). Rockwool 1 : peatmoss 1 (v/v) was the most effective on growth and rooting for both cultivars and high volume of Tosilee medium and rockwool were most effective media for both cultivars.

Improving the subcritical water extraction of flavonoids narirutin and hesperidin from Citrus unshiu peel by pulsed electric fields

Hui-Ju Kim,Mi-Ri Kwon,Hye-Ji Kang,Na-Yeon Kim,Hee-Jeong Hwang,Min-Jung Ko,Myong-Soo Chung 한국산업식품공학회 2017 학술대회 및 심포지엄 Vol.2017 No.11

Citrus fruit is important source of flavonoids, mainly flavanones which are narirutin and hesperidin. Those citrus flavonoids have been found to have health-related properties including antioxidant, anticancer, and anti-inflammatory. The main purpose of this study was to verify that the extraction of narirutin and hesperidin from Citrus peel can be more effective by combining pulsed electric field (PEF) pre-treatment and subcritical water extraction (SWE). Citrus unshiu peels were treated with PEF under conditions of electric field strength (3 kV/cm) and times (1 and 2 min). Subsequent SWE was conducted by using a Dionex Accelerated Solvent Extractor (ASE, Model 350) at extraction temperature 170°C for 10 min. The total flavonoids content was measured by using the aluminum chloride colorimetric method and the antioxidant capacity was analyzed by the Ferric reducing antioxidant power (FRAP) assay using spectrophotometer. The concentrations of narirutin and hesperidin were increased as PEF pre-treatment time increased. The highest concentrations of narirutin and hesperidin were 13.41 mg narirutin/g dry citrus peel and 141.16 mg hesperidin/g dry citrus peel at PEF pre-treatment condition of 3 kV/cm and 2 min. The total flavonoids contents of the extracts increased 105.2% and 123.1% for citrus peel PEF treated at 1 and 2 min, respectively. In addition, compared to the untreated sample, PEF pre-treatments of 1 and 2 min increased the antioxidant capacity of the extracts 109.2% and 160.8%, respectively. Therefore, the results demonstrate the potential of PEF pre-treatment to improve the SWE of flavonoids from citrus unshiu peel.

원산지별 감초추출물의 항산화활성 증가를 위한 효율적인 추출조건 탐색

하지훈 ( Ji Hoon Ha ),이혜미 ( Hye Mi Lee ),권순식 ( Soon Sik Kwon ),김해수 ( Hae Soo Kim ),김문진 ( Moon Jin Kim ),전소하 ( So Ha Jeon ),정유민 ( Yoo Min Jeong ),황준필 ( Jun Pil Hwang ),박종호 ( Jong-ho Park ),최영기 ( Yung-key 대한화장품학회 2013 대한화장품학회지 Vol.39 No.4

본 연구에서는 한국 및 중국산 감초(Glycyrrhiza uralensis), 그리고 우즈베키스탄산 감초(Glycyrrhiza glabra)를 대상으로 추출용매, 추출온도, 추출시간 등 추출조건별 추출물을 제조하고 이들 추출물들의 추출 수율과 항산화 활성을 비교하여 최적의 추출조건을 선정하였다. 항산화 활성 중 자유 라디칼(1,1-phenyl-2-pic-rylhydrazyl, DPPH) 소거활성은 85% 에탄올로 60 ℃에서 6 h 동안 추출한 조건에서 한국 감초로부터 얻은 추출물이 가장 높은 활성(46.05%)을 나타내었다. 루미놀 발광법을 이용한 추출물들의 총 항산화능 측정 실험과 피부 광노화에 중요한 ¹O₂으로 유도된 세포막 손상에 대한 추출물들의 세포 보호 효과를 측정한 실험 모두에서도 위의 조건에서 가장 높은 항산화 활성을 나타내었다. 특히, 한국 감초는 τ₅₀이 116.4 min으로 비교 물질인(+)-α-tocopherol (28.5 min)보다 약 4 배나 높은 세포 보호 효과를 나타내었으며, 추출 수율은 18.75%로 우즈베키스탄 및 중국 감초보다 각각 1.2 배 및 2.5 배의 추출 수율을 나타내었다. 따라서, 본 연구 결과는 항산화 소재로 화장품에 응용하기 위하여 감초로부터 추출물을 얻기 위한 최적의 조건은 85% 에탄올로 60 ℃에서 6시간 동안 추출하는 것임을 보여주었다. In this work, licorice extracts were prepared using various extraction conditions such as extraction solvent, temperature, and time from Glycyrrhiza uralensis (G. uralensis) produced in Korea and China and Glycyrrhiza glabra (G. glabra) in Uzbekistan. The optimum extraction condition was selected from the extraction yields and antioxidative activities of extracts. Korea licorice extracts showed the highest free radical (1,1-diphenyl-2-picrylhydrazyl, DPPH) scav-enging activity (46.05%) under the extraction condition of 85% ethanol at 60 ℃ for 6 hours. The prominent ROS (reactive oxygen species) scavenging activity using luminol-dependent chemiluminescence assay and the cellular protective effect against ¹O₂ induced cellular membrane damage were also shown from the extracts obtained from the same condition. Especially, Korea G. uralensis extracts exhibited the higher prominent protective effect (τ₅₀ = 116.4 min) than (+)-α-tocopherol (τ₅₀ = 28.5 min) and the extraction yield of Korea licorice extract was 18.75%, which is 1.2 times and 2.5 times higher than that of Uzbekistan and China, respectively. These results indicate that the extraction condition of 85% ethanol at 60 ℃ for 6 hours is optimal to prepare licorice extracts, which can be applicable as antioxidative cosmetic materials.

Dry etching of polydimethylsiloxane using microwave plasma

Hwang, Sung Jin,Oh, Dong Joon,Jung, Phill Gu,Lee, Sang Min,Go, Jeung Sang,Kim, Joon-Ho,Hwang, Kyu-Youn,Ko, Jong Soo IOP 2009 JOURNAL OF MICROMECHANICS AND MICROENGINEERING - Vol.19 No.9

<P>This paper presents a new polydimethylsiloxane (PDMS) dry-etching method that uses microwave plasma. The applicability of the method for fabricating microstructures and removing residual PDMS is also verified. The etch rate of PDMS was dominantly influenced by the gas flux ratio of CF<SUB>4</SUB>/O<SUB>2</SUB> and the microwave power. While the PDMS etch rate increased as the flux ratio of CF<SUB>4</SUB> was increased, the etch rate decreased as the flux ratio of O<SUB>2</SUB> was increased. The maximum etch rate of 4.31 µm min<SUP>−1</SUP> was achieved when mixing oxygen (O<SUB>2</SUB>) and tetrafluoromethane (CF<SUB>4</SUB>) at a 1:2 ratio at 800 W power. The PDMS etch rate almost linearly increased with the microwave power. The ratio of the vertical etch rate to the lateral etch rate was in a range of 1.14–1.64 and varied with the gas fluxes. In consideration of potential applications of the proposed PDMS etching method, array-type PDMS microwells and network-type microprotrusion structures were fabricated. The contact angle was dramatically increased from 104° (non-etched PDMS surface) to 148° (etched PDMS surface) and the surface was thereby modified to be superhydrophobic. In addition, a thin PDMS skin that blocked holes and PDMS residues affixed in nickel microstructures was successively removed.</P>