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Fabrication of Aluminum/Alumina Patterns using Localized Anodization of Aluminum
박종호,김범준,Jacques Fattaccioli,Hiroyuki Fujita 한국정밀공학회 2012 International Journal of Precision Engineering and Vol. No.
In this paper, we investigated the localized anodization of aluminum evaporated on silicon substrate using micro scale patterns. Positive (S1818) and negative (SU-8 2035, KMPR 1010, KMPR 1035) photoresist patterns as well as SiO2 micro patterns were fabricated on aluminum substrates respectively. Then, anodization of each substrate was performed in oxalic acid electrolyte. We observed the formation of aluminum/alumina patterns on a flat substrate by SEM images of its crosssection. This work provides an easy and simple technique for the fabrication of aluminum/alumina micro patterns by localized anodization.