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열차단막 응용을 위한 Al₂O₃ 에 증착된 Y₂O₃ 나노박막의 열전도도 와 경계면열저항에 관한 연구
김종욱(Jong-Wook Kim),김경천(Kyung-Chun Kim),박건형(Gun-Hyung Park),양호순(Ho-Soon Yang),김청식(Chung-Sik Kim),홍경수(K. S. Hong),김석로(Seok-Ro Kim) 대한기계학회 2006 대한기계학회 춘추학술대회 Vol.2006 No.11
The effect of interfaces on thermal conductivity is studied with Y₂O₃ thin films deposited on an Al₂O₃ substrate. Y₂O₃ thin films with the thickness between 100 and 500 ㎚ are prepared by RF magnetron sputtering and thermal conductivity of the films is measured by the 3 omega method. The strong film thickness-dependent thermal conductivity is observed due to the interfacial thermal resistance. The relationship between the interfacial thermal resistance and film thickness-dependent thermal conductivity is derived from a temperature profile across a thin film having an interface with a substrate.