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정상화,차경래,김현욱,최석봉,김광호,박준호 한국공작기계학회 2005 한국공작기계학회 춘계학술대회논문집 Vol.2005 No.-
In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the optical alignment characteristics of multi-axis ultra precision stage were studied. The alignment algorithms were studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Two kinds of alignments, such as 1ch. input vs. 1ch. output optical stack, and 1ch. input vs. 8ch. output PLC stacks were performed for investigating the alignment characteristics.