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정규원(Kyuwon Jeong),박종성(Jongsung Park) 한국생산제조학회 2009 한국공작기계학회 추계학술대회논문집 Vol.2009 No.-
For an ultra high precision stage a PZT actuator is used as an actuator in order to obtain nano meter resolution. However, such stage system has much uncertainty in modeling stage and actuator. The mechanical structure has many vibration mode and the PZT has hysteresis and creep phenomena. In this paper tracking performance for sinusoidal reference is enhanced by a controller which is designed based upon H infinity design method. A series of experiments were conducted and results were shown.