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Chemical Vapor Deposition of Tungsten on TiN Surface
이청,이시우,이건홍,Yi, Chung,Rhee, Shi-Woo,Lee, Kun-Hong The Institute of Electronics and Information Engin 1992 전자공학회논문지-A Vol.29 No.4
Tungsten film was deposited on the TiN surface in a low pressure chemical vapor deposition reactor and chemical reaction mechanism between TiN surface and ($WF_{6}\;and\;SiH_{4}$ was studied. Interaction of ($WF_{6}\;or\;SiH_{4}$ with TiN surface and tungsten was deposited more easily. $WF_6$ reacted with TiN activated the TiN surface to form volatile TiF_4$ and tungsten nuclei were formed. ($SiH_{4}$ was dissociated on the TiN surface to form silicon nuclei. From RBS and AES analysis, we could not detect the impurities(such as Si or TiF$_x$)at the interface between tungsten and TiN. The adhesion at the W/TiN interface became poor when the deposition temperature was below 275$^{\circ}C$.
태양에너지 활용연구 2 . 태양열난방과 냉방 , 태양증발기 , 온실 및 태양열건조
박원훈,이시우,박원희 ( Won Hoon Park,Shi Woo Rhee,Won Hee Park ) 한국화학공학회 1977 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.15 No.3
Solar residential heating and cooling, solar stills producing potable water, greenhouse and solar dehydration as agricultural applications are reviewed with an emphasis on similar R & D activities in Korea. These phases of solar energy utilization at low temperature are considered the most attractive as practical means. Solar space heating and solar stills are already in operation in many localities competing with conventional methods. As for greenhouse and solar dehydration research efforts are concentrated on effective energy management by reducing heat loss and cost-effective system development, respectively. Technical details of solar space cooling are still under tests. Solar energy utilization at high temperature will be reviewed in part Ⅲ of this series.
박원훈,이시우,박원희 ( Won Hoon Park,Shi Woo Rhee,Won Hee Park ) 한국화학공학회 1977 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.15 No.2
The solar energy is presently the most promising as an alternative energy source, and R&D activities on its utilization are reviewed to provide a stimulant for similar efforts in energy-importing Korea. The so-called low, temperature utilization such as solar space heating and cooling, greenhouse, solar still and solar dehydration is more emphasized as practical means of implementation in developing countries. Whereas sophisticated solar thermal power generation employing solar concentration principle, heliochemical and helioelectric researches are briefly reviewed. Part I discusses the systematic classification of solar energy utilization, flat-plate solar collector upon which solar energy economics depends mostly, and the simplest system made of this collector, namely, solar water heater.
태양에너지 활용 연구 3 . 집광집열기 , 태양열발전 및 태양광발전
박원훈,이시우,박원희 ( Won Hoon Park,Shi Woo Rhee,Won Hee Park ) 한국화학공학회 1977 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.15 No.4
In this last part of review series intermediate and high temperature application of solar concentrator, solar thermal power generation, and solar photovoltaic conversion are described. At higher temperatures efficient and large-scale industrial utilization of solar energy are expected by generating electricity. However, since R&D works on these fields require large investment and highly advanced technology, economic and technical feasibility is not forseeable in the near future.