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전자빔 리소그래피에서의 근접효과 보정을 이용한 패턴 제작에 관한 연구
오세규,김동환,김승재,Oh, Se-Kyu,Kim, Dong-Hwan,Kim, Seung-Jae 한국반도체디스플레이기술학회 2009 반도체디스플레이기술학회지 Vol.8 No.2
This study describes the electron beam lithography pattern fabrication using the proximity effect correction. When electron beam exposes into electron beam resist, the beam tends to spread inside the substance (forward scattering). And the electron beam reflected from substrate spreads again (back scattering). These two effects influence to distribution of the energy and give rise to a proximity effect while a small pattern is generated. In this article, an electron energy distribution is modeled using Gaussian shaped beam distribution and those parameters in the model are computed to solidify the model. The proximity effect is analyzed through simulations and appropriate corrections to reducing the proximity effect are suggested. It is found that the proximate effect can be reduced by adopting schemes of dose adjustment, and the optimal dose is determined through simulations. The proposed corrected proximity effect correction is proved by experiments.
전자빔 리소그래피를 이용한 주사기법에 따른 패턴형상 조정
오세규,김승재,김동환,박근,장동영,Oh, Se-Kyu,Kim, Seoung-Jae,Kim, Dong-Hwan,Park, Keun,Jang, Dong-Young 한국생산제조학회 2009 한국생산제조학회지 Vol.25 No.2
To aim at obtaining a correct and fine small pattern by an electron beam lithography several conditions and methods affecting a real pattern shape needs to be investigated. A micro/nano sized pattern shape is sometimes dependent on the scanning method. In this work, four types of scanning methods are implemented and their characteristics are investigated. For a $11\times11um$ pattern, a Zigzag scanning method proves a precise pattern generation. The other ways such as SEM scanning and swirl in-out scanning method result in some distorted pattern shape. It is proved that abrupt change in the pattern generation limits to obtaining a fine and small pattern.
마찰용접에 의한 드릴 생산에서의 AE에 의한 실시간 품질평가에 관한 연구
오세규(Sae-kyoo Oh),윤인진(In-jin Yoon),오정환(Jung-hwan Oh),오명석(Myeong-seok Oh) 한국해양공학회 1993 韓國海洋工學會誌 Vol.7 No.2
A study off riction welding of high speed steel(SKH 51) bar for blade side to carbon steel (STC 3) bar for shank side was carried out experimentally through tensile test, hardness test, microstructure, and acoustic emission(AE) test.<br/> So, this paper deals with optimizing the welding conditions and the real-time quality (strength) evaluation of friction welded joints by acoustic emission technique.<br/> The results obtained are summarized as follows :<br/> (1) For friction welded joints of SKH 51 to STC 3 steel bars, the total upset (U) increases linearly with an increase of heating time (t₁).<br/> (2) The determined optimum welding conditions are heating time (t₁) 7~9 sec, upsetting time (t₂) 5 sec, heating pressure(P₁) 12 ㎏f/㎟, upsetting pressure(P₂) 15 ㎏f/㎟ and rotating speed(n) 2,000 rpm, resulting in a computed relationship between the tensile strength of the joint σ (㎏f/㎟) and the heating time t₁ (sec) as the following : σ=2.39t₁<SUP>1.382</SUP><br/> (3) The quantitative relationship equation between AE cumulative counts(N) and the tensile strength(a) of the welded joints friction-welded under the obove optimal condition is computed as the following : σ=0.07N<SUP>0.61</SUP><br/> (4) From the quantitative relationship between the accumulated AE total count and the welding strength, it was confirmed that the nondestructive real-time evaluation of welding quality(strength) could be possible.
ISM에 의한 摩擦熔接材(SUH3-SUH35)의 高溫 크리프 壽命豫測에 관한 연구
오세규(Sae-Kyoo Oh),이원석(Won-Suk Lee) 한국해양공학회 1997 韓國海洋工學會誌 Vol.11 No.4
There are many research results as individual uni-axial tension creep test of heat-resisting materials. However, there are very few about the study on the high temperature creep test for the Initial Strain Method, and especially any study on it about the friction welded joints of SUH3 to SUH35.<br/> One of the important concerns is a reliable method of evaluating static creep properties. No reliable method seems available at present to evaluate or predict static creep properties. So, the reliable method to evaluate and predict them by the ISM and AE techniques was made.
유공압 밸브 스풀용 강재의 봉대봉 이종재 마찰용접 최적화와 용접강도 특성 및 AE 평가
오세규(Sae-Kyoo Oh),유인종(In-Jong Yoo),오정환(Jung-Hwan Oh),박형동(Hyung-Dong Park),이연탁(Yeon-Tack Lee) 한국해양공학회 1996 韓國海洋工學會誌 Vol.10 No.3
Up to now, most of studies on mechanical properties in friction welded components are about tensile and bending strength. However the fatigue studies on the friction-welded components subjected to repeated stress are not available. The purposes of this study are the development of fundamental design and manufacturing technique of hydraulic valve spool by optimizing of friction welding, and the development of in-process real-time weld quality evaluation technique by acoustic emission for the bar-to-bar dissimilar friction welding of hydraulic valve spool steels.