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이온의 탄성충돌모델에 의한 플라즈마 식각단면의 전산모사
한재현,문상흡,정찬화,조병옥 한국화학공학회 1994 Korean Chemical Engineering Research(HWAHAK KONGHA Vol.32 No.3
본 연구에서는 플라즈마 식각에 의해 생성되는 도랑의 단면을 공정의 내부변수를 사용한Monte Carlo방법에 의하여 전산모사하였다. 플라즈마로부터 sheath로 유입된 이온은 전기장에 의해 가속되어 기판을 식각하는데, sheath를 진행하는 동안에 수많은 중성입자와 불규칙적으로 충돌하기 때문에 진행방향과 에너지가 달라지고, 결국 기판에 도달하는 이온의 입사각과 에너지가 여러 값을 갖게 된다. 본 연구에서는 이온과 중성입자간에 탄성충돌이 일어난다고 가정하여 이온의 진행방향과 에너지 분포를 구하였고, 이를 이용하여 기판의 식각단면을 구하였다. 이온의 평균자유행로와 sheath 두께의 비가 클수록 식각단면의 비등방도가 커지고 식각면의 중간부분이 불룩해지는 bowing현상이 감소하였다. 또한, 식각하려는 선폭이 작고 이온의 평균자유행로/sheath 두께비가 작을 때에는 식각속도가 현저히 줄어드는 현상이 나타났다. 식각면의 하부구석에 도랑이 생기는 소위 "trenching (또는 dove tail) 현상"은 이온이 식각벽면에 부딪힌 후에 되튀어 나가는 경우를 고려하여 실제단면과 유사하게 모사할 수 있었다. Profiles of narrow and deep trenches produced by plasma ion etching have been simulated by a Monte Carlo method based on simple collision model. In the plasma etching process, ions from the bulk plasma are introduced into the sheath layer to be accelerated by the electric field toward the electrode plate. A substrate on the electrode plate is etched by the incident ions, whose kinetic energy and travelling direction are modified by random collisions with the neutrals in the sheath. We have simulated the ion etching process assuming an elastic collision between the ions and the neutrals in the sheath layer. Distribution functions for the ion energy and its arrival angle at the substrate surface have been obtained, and they have been used for computation of the time-dependent etch profile of the substrate by string algorithm. Profile of the etched trench has higher aspect ratio when the ratio between the mean free path of the ion and the thickness of the sheath layer(MFP/Sh) is larger. The etch rate decreases as the MFP/Sh ratio becomes smaller and the mask width narrower, which agrees with the experimental observations. The so-called "dove tail"(or "trenching") shape observed at the bottom corner of the etched trench may be simulated successfully by considering the ions glancing from the side wall after collision at low angles.
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한재현 대한언어학회 1998 언어학 Vol.6 No.1
Han, Jae-Hyeon. 1998. Structure of the Predicate Phrase. Linguistics, 6-1, 65-92. The purpose of this paper is to explore the syntactic and semantic aspects of the small clause in the predicate structures. There are two types of the small clauses in Korean. The one type is incomplete complement structure such as the finite tense clause and nonfinite tense clauses. For instance, the former type is John-ka Mary-eul buza-ta-ko mitunta(John belives Mary to be rich) and the later type is John-ga bal-i put-ke geuless-ta (John walked so that his feet were swollen). In the analysis of the small clauses, we first review the problems of their argument structures and advocate the PrP functional categories in Korean small clause analysis. According to the PrP functional category we describe the syntactic and semantic structures of the verbs and so-called secondly predicates in Korean. Especially the small clause structures, whether they have tense or not, can be classified as the ordinary, exceptional, and small clauses under the PrP functional analysis. (Sungsil University)
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韓載賢 全北大學校 1970 論文集 Vol.12 No.-
The following contrastive analysis between English and Korean has been conceived with the language learner in mind. Such a study should provide much useful material for Koreans studying English. By contrasting the differences and similarities of the segmental phonemes of the two languages, one can hope to isolate the particular difficulties arising from articulation as well as to develop more systematic teaching of the problems, resulting in better language learning. The most important difference between the two languages is that while aspiration results in phonemic differences in korean, it represents only allophonemic differences in English; also, while voicing in English is phonemic, voicing in Korean is allophonemic. Furthermore, the distribution of consonants and vowels is quite different. In Korean the vowels appear as syllable kernels and there are no consonant clusters in one syllable at all, while consonant clusters are quite common in English. Thus it is that the Korean learner of English tends to insert useless vowels between the consonant clusters. Further problems arise in the assimilation and change of phonemes when used in actual sentences. In particular, since assimilation occurs in Korean, it creates little difficulty in aural comprehension of English but tempts the Korean leanner of English to apply Korean assimilation habits to English pronunciation. This is even a greater problem for speakers of English who are trying to learn Korean. In addition, the lack of palaterization in English causes speakers of English to have a particularly difficult time learning this property of Korean language. Although suprasegmental phonemes may seem simple, English stress and pitch pose extremely difficult problems for Koreans. In English parts fo speech are often denoted by the position of stress, while pitch determines the sentence pattern. It is very difficult to learn these features of English which are entirely absent from Korean. It is from the need for eventual solution of this problem and the other problems not mentioned hear that the need for contrastive analysis arises.
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