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DMD를 이용한 LDI 시스템의 미세패턴 생성을 위한 최적의 초점거리에 대한 연구
신봉철(Bong Cheol Shin),조용규(Yong Kyu Cho),하석재(Seok Jea Ha),김규복(Kyu Bok Kim),조명우(Myeong Woo Cho) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
Recently, LDI(laser direct imaging) technoloy is being researched to make micro circuit pattern. In this study, LDI system was developed using DMD(digital micromirror device) and experiment of pattern generating according to focal length was perfomed. Generated noncontinuous pattern due to gap of DMD was changed to continuous pattern by control of focal length. Width of pattern was increased by defocusing. Therefore, optimal focal length was selected by measurement of profile. As a result, optimal focal length was selected location of 120μm away from focus.