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NTC 써미스터가 내장된 항온 제어용 소형 열전 냉각 모듈 제조
박종원,최정철,황창원,최승철,Park J. W.,Choi J. C.,Hwang C. W.,Choi S. C. 한국마이크로전자및패키징학회 2004 마이크로전자 및 패키징학회지 Vol.11 No.3
NTC thermistor embedded miniature thermoelectric module was fabricated for the precise temperature control of optical communication device such as laser diode (LD). The miniature thermoelectric module ($7.2 mm{\times}9 mm{\times}2.2 mm$) consists of 21 BiTe thermoelectric couples, the operating temperature is precisely controlled by embedded thermistor with quick response. The figure-of-merit (Z), maximum temperature difference (${\Delta}T_{max}$), maximum cooling capacity ($Q_{max}$) of the miniature thermoelectric module were $2.5{\times}10^{-3}$/K, 72 K, 2.2 W respectively and temperature could be controlled in range of ${\pm}0.1^{\circ}C$ accuracy in air. The fabricated miniature thermoelectric module is suitable for applications of the optical communication packaging.