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마이크로 팩토리 검사시스템용 자기측정 나노 스테이지개발
최수창,김용우,박정우,이득우 한국공작기계학회 2006 한국공작기계학회 추계학술대회논문집 Vol.2006 No.-
This paper describes the development of a nano-positioning system for Micro Factory Inspection System. Conventional positioning systems, which can be expensive and complicated, require the use of laser interferometers or capacitive transducers to measure nanoscale displacements of the stage. In this study, a new self-displacement sensing (SDS) nano-stage was developed using mechanical magnification of its displacement signal. The SDS nano-stage measured the displacement of its movement using a position-sensitive photodiode (PSPD), a laser source, and a hinge-connected rotating mirror plate. A beam from a laser diode was focused onto the middle of the plate with the rotating mirror. The position variation of the reflected beam from the mirror rotation was then monitored by the PSPD. Finally, the PSPD measured the amplified displacement as opposed to the actual movement of the stage via an optical lever mechanism, providing the ability to more precisely control the nanoscale stage. The displacement amplification process was modeled by structural analysis. The simulation results of the amplification ratio showed that the distance variation between the PSPD and the mirror plate as well as the length L of the mirror plate could be used as the basic design parameters for a SDS nano-stage. Based on these results, a SDS nano-stage was fabricated using principle of displacement amplification.
최수창,김진근,김용우,박정우,이득우 한국공작기계학회 2009 한국공작기계학회 춘계학술대회논문집 Vol.2009 No.-
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This type of system was installed separately from the stage. It was also difficult to apply the system to the stage. This study developed a mechanical magnification type stage to evaluate characteristics. As a result, it was possible to fabricate a stage with the smallest measurable resolution was found to be at 0.25㎚.
최수창,김용우,박정우,이득우 한국공작기계학회 2007 한국공작기계학회 추계학술대회논문집 Vol.2007 No.-
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This type of system was installed separately from the stage. It was also difficult to apply the system to the stage. This study developed a combined magnification type stage to evaluate characteristics. As a result, it was possible to fabricate a stage with an magnification ratio of approximately 10,000, and the smallest measurable resolution was found to be at 0.7nm.
최수창,김용우,김진근,박정우,이득우 한국공작기계학회 2008 한국공작기계학회 추계학술대회논문집 Vol.2008 No.-
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This study developed a inverse magnification type stage to evaluate characteristics. Therefore, we introduced a nano-stage with a magnification mechanism for the position feedback system.
p-Zn0.56Cd0.44Se 박막의 제작 및 물리적 특성
최수창,윤은정,한동헌,이종덕,박창영,이정주 한국물리학회 2012 새물리 Vol.62 No.11
Zn_(0.56)Cd_(0.44)Se films were prepared on indium-tin-oxide (ITO)-coated glass substrates by using thermal evaporation. X-ray diffraction spectra showed that the Zn_(0.56)Cd_(0.44)Se films had a mixture structure of ZnSe zincblende structure and CdSe wurtzeit strcture with lattice constant a = 5.67 A~and that the crystals were preferentially grown zincblende structure with a (111)orientation. The optical energy band gap, measured at room temperature, of the as-deposited Zn_(0.56)Cd_(0.44)Se film was 2.31 eV and decreased to about 2.23 eV and then increased to 2.27 eV upon annealing in a vacuum electric furnace at temperatures from 200℃ to 400 ℃. The dynamical behavior of the charge carriers in the Zn_(0.56)Cd_(0.44)Se film was investigated by using photoinduced discharge characteristics (PIDC) techniques. 진공증착법으로 ITO(indium-tin-oxide) 기판 위에Zn_(0.56)Cd_0.44)Se 박막을 제작하였다. X-선 회절 분석에 의하여박막의 살창상수는 a = 5.67 A 으로 ZnSe의 섬아연광 구조와 CdSe의우르짜이트 구조의 혼합인 구조를 하고 있었으며, 그 성장방향은 (111)방향의 섬아연광 구조로 선택 성장됨을 알 수 있었다. 증착된Zn_(0.56)Cd_(0.44)Se 박막에 대하여 실온에서 측정한 광학적인에너지 띠 간격은 2.31 eV이었고, 열처리 온도를 증가함에 따라감소하다가 증가하였으며, 200℃ ~ 400 ℃로열처리한 박막의 광학적 에너지 띠 간격은 2.23 eV~ 2.27eV이었다. Zn_0.56Cd_0.44Se 박막 내의 전하운반자들의 동역학적거동을 광유기 방전 특성(PIDC : photoinduced discharge characteristics) 방법으로 조사하였다.
최수창(Soo-chang Choi),김용우(Yong-woo Kim),박정우(Jung-Woo Park),이득우(Deug-woo Lee) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
The laser-interferometer and capacitive displacement sensors were used to increase the resolution of the feedback system for stage used for measuring and processing the system. However, it was difficult to obtain high-resolution measurements, considering the measuring method and structural characteristics. This type of system was installed separately from the stage. It was also difficult to apply the system to the stage. This study developed PSM Nanotage for AFM.