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2축 마이크로 플러스게이트 센서 제작을 통한 전자 나침반 개발
박해석,심동식,나경원,황준식,최상언 대한전기학회 2003 전기학회논문지C Vol.52 No.9
- This paper describes an electronic compass using micromachined X- and Y-axis micro fluxgate sensors which were perpendicularly aligned each other to measure X- and Y-axis magnetic fields respectively. The fluxgate sensor was composed of rectangular-ring shaped magnetic core and solenoid excitation(49 turns) and pick-up(46 turns) coils. Excitation and pick-up coil patterns which were formed opposite to each other wound the magnetic core alternatively to improve the sensitivity and to excite the magnetic core in an optimal condition with reduced excitation current. The magnetic core has DC effective permeability of ~1000 and coercive field of ~0.1 Oe. The magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. To decrease the difference of induced second harmonic voltages from X- and Y-axis, excitation condition of 2.8 VP-P and 1.2 MHz square wave was selected. Excellent linear response over the range of -100 μT to +100 μT was obtained with 210 V/T sensitivity. The size of each micro fluxgate sensor excluding pad region was about 2.6×1.7 mm2 and the power consumption was estimated to be 14 mW.
최원열,황준식,강명삼,최상언 한국마이크로전자및패키징학회 2002 마이크로전자 및 패키징학회지 Vol.9 No.3
본 논문은 인쇄회로 기판 (PCB)에 내장된 마이크로 플럭스게이트 자기센서 (micro fluxgate magnetic sensor)에 대한 것으로써, 센서의 제작과 폐자로 형성에 따른 자계 검출 특성 변화에 관한 것이다. 이를 위해 연자성 코아를 사각링 형태와 두개의 바 (bar)형태로 각각 구현하였다. 제작을 위해 모두 5층의 기판을 적층하였으며, 가운데 (3번째) 기판을 자성체 코아로, 자성체 코아 외부 (2번째와 4번째) 기판을 여자코일로, 최외부 (1번째와 5번째) 기판을 검출코일로 제작하였다. 연자성 코아로는 약 100,000의 큰 DC 투자율 (permeability)을 갖는 코발트 (Co)가 주성분인 아몰퍼스 재료를 사용하였으며, 여자코일과 검출코일은 구리를 사용하였다. 제작된 자기센서는 여자조건이 360 KHz, $3V_{p-p}$의 구형파일 경우에 사각링 형태의 연자성 코아를 갖는 자기센서에서는 540V/T로 매우 우수한 감도를 보이고 있으며, -100 $\mu$T~+100 $\mu$T 영역에서 매우 우수한 선형특성을 보이고 있다. 자기 센서의 크기는 $7.3 \times 5.7\textrm{mm}^2$ 이며, 소비전력은 약 8 mW이다. 이런 초소형 자기센서는 휴대용 navigation 시스템, telematics, VR 게임기 등 다양한 응용분야에 적용할 수 있다. This paper presents a micro fluxgate magnetic sensor in printed circuit board (PCB). In order to observe the effect of the closed magnetic path, the magnetic cores of rectangular-ring and two bars were each fabricated. Each fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a Co-based amorphous magnetic ribbon with extremely high DC permeability of ~100,000. Four outer layers as an excitation and pick-up coils have a planar solenoid and are made of copper foil. In case of the fluxgate sensor having the rectangular-ring shaped core, excellent linear response over the range of -100 $\mu$T to + 100 $\mu$T is obtained with 540 V/Tsensitivity at excitation square wave of 3 $V_{p-p}$ and 360 KHz. The chip size of the fabricated sensing element is $7.3 \times 5.7\textrm{mm}^2$. The very low power consumption of ~8 mW was measured. This magnetic sensor is very useful for various applications such as: portable navigation systems, telematics, VR game and so on.n.
최원열,황준식,강명삼,최상언 한국전기전자재료학회 2002 전기전자재료학회논문지 Vol.15 No.8
This paper presents a micro fluxgate sensor in printed circuit board (PCB). The fluxgate sensor consists of five PCB stack layers including one layer magnetic core and four layers of excitation and pick-up coils. The center layer as a magnetic core is made of a micro patterned amorphous magnetic ribbon and the core has a rectangular-ring shape. The amorphous magnetic core is easily saturated due to the low coercive field and closed magnetic path for the excitation field. Four outer layers as an excitation and pick-up coils have a planar solenoid structure. The chip size of the fabricated sensing element is 7.3$\times$5.7$\textrm{mm}^2$. Excellent linear response over the range of -100$\mu$T to +100$\mu$T is obtained with 540V/T sensitivity at excitation square wave of 3 $V_{p-p}$ and 360kHz. The very low power consumption of ~8mW was measured. This magnetic sensing element, which measures the lower fields than 50$\mu$T, is very useful for various applications such as: portable navigation systems, military research, medical research, and space research.h.
MEMS 공정 제작방법에 의한 솔레노이드형 여자 코일과 검출코일을 사용한 마이크로 플럭스게이트 센서
나경원,박해석,심동식,최원열,황준식,최상언 한국전기전자재료학회 2003 전기전자재료학회논문지 Vol.16 No.2
This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structure solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20${\mu}$m width and 3${\mu}$m thickness is electroplated on Cr (300${\AA}$) / Au (1500${\AA}$) films for the pick-up (42turn) and the excitation (24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3${\mu}$m is obtained under 2000 gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ~1,100 and coercive field of ~0.1 Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150 V/T at the excitation frequency of 2 MHz and the excitation voltage of 4.4 V$\_$p p/. The power consumption is estimated to be 50mW.
Worku Dinku,Johan Isaksson,Fredrik Garnås Rylandsholm,Petr Bouř,Eva Brichtová,최상언,이상호,정영식,노재성,John Sigurd Mjøen Svendsen,Arne Jørgen Aasen,Aman Dekebo 한국응용생명화학회 2020 Applied Biological Chemistry (Appl Biol Chem) Vol.63 No.2
Myrrh, a resin derived from the damaged bark of Commiphora genus, has traditionally been used for treatment of various human diseases, such as amenorrhea, ache, tumors, fever, and stomach pains. In spite of this widespread use of the myrrh in Ethiopia, the pharmacological activity and chemical composition have not been studied in detail. A new tricyclic triterpene acid (3S,4S,14S,7E,17E,21Z)-3,30-dihydroxypodioda-7,17,21-trien-4-carboxylic acid (commafric A) has been isolated from a crude methanolic extract of Commiphora africana (A. Rich.) Engl. resin along with the known pentacyclic triterpene α-amyrin. The structure of commafric A was characterized using different spectroscopic techniques such as 1D and 2D NMR, IR, and VCD combined with computations. The anti-proliferative activity of both isolated compounds was evaluated using SRB based colorimetric cellular assay against four human cancer cell lines. Etoposide was used as a positive control. Commafric A showed significant anti-proliferative effects against non-small cell lung cancer (A549) with IC50 values of 4.52 μg/ml. The pentacyclic triterpene α-amyrin showed a weak antiproliferative activity against A2780 (ovarian cancer), MIA-PaCa-2 (pancreatic cancer), and SNU638 (stomach cancer) cell lines tested with IC50 values ranging 9.28 to 28.22 μg/ml. Commafric A possessed anti-proliferative activity against non-small cell lung cancer (A549), which suggests that commafric A has potential to be further optimized being a lead compound in the search for new drugs against cancer diseases.
모바일 장치용 MEMS 기반 보행항법시스템을 위한 맵매칭 알고리즘
신승혁(Seung Hyuck Shin),김현욱(Hyun Wook Kim),박찬국(Chan Gook Park),최상언(Sangon Choi) 제어로봇시스템학회 2008 제어·로봇·시스템학회 논문지 Vol.14 No.11
We introduce a MEMS-based pedestrian dead reckoning (PDR) system. A walking navigation algorithm for pedestrians is presented and map-matching algorithm for the navigation system based on dead reckoning (DR) is proposed. The PDR is equipped on the human body and provides the position information of pedestrians. And this is able to be used in ubiquitous sensor network (USN), U-hearth monitoring system, virtual reality (VR) and etc. The PDR detects a step using a novel technique and simultaneously estimates step length. Also an azimuth of the pedestrian is calculated using a fluxgate which is the one of magnetometers. Map-matching algorithm can be formulated to integrate the positioning data with the digital road network data. Map-matching algorithm not only enables the physical location to be identified from navigation system but also improves the positioning accuracy. However most of map-matching algorithms which are developed previously are for the car navigation system (CNS). Therefore they are not appropriate to implement to pedestrian navigation system based on DR system. In this paper, we propose walking navigation system and map-matching algorithm for PDR.