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자기력을 이용한 비접촉 6자유도 미소위치결정 기구의 개발-설계, 모델링 및 제어-
최기봉,박기환,김수현,곽윤근,Choi, Kee-Bong,Park, Kyi-Hwan,Kim, Soo-Hyun,Kwak, Yoon-Keun 대한기계학회 1996 大韓機械學會論文集A Vol.20 No.4
A magnetically levitated micro-positioner is implemented to avoid mechanical friction and increase precision. Since magnetic levitation system is inherently unstable, most concern is focused on a magnetic circuit design to increase the system dynamic stability. For this, the proposed levitation system is constructed by using an antagonistic structure which permits a simple design and robust stability. From the dynamic equations of motion, it is verified that the proposed magnetically levitated system is decoupled in 6 degree-of-freedom motion. Experimental results are presented in terms of time response and accuracy.
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김기홍(Gee Hong Kim),임형준(Hyung Jun Lim),정대성,신은주(Eun Joo Shin) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
This paper proposed an alignment stage for contact-type lithography process such as nano-imprint lithography process. The alignment stage is of a compliant mechanism driven by stack-type piezo actuators. Six piezo actuators are employed for 3-DOF planar motion. This stage accomplishing a high stiffness due to an antagonistic arrangement of the piezo actuators is actuated by differential forces of the antagonistic arrangement of the piezo actuators. The stage is designed and then proposed a new operational principle to generate the planar motion of the stage.
미세 부품 조작을 위한 탄성힌지 기반 압전소자 구동형 초정밀 머니퓰레이션 시스템
최기봉(Kee-Bong Choi),이재종(Jae Jong Lee),김기홍(Gee Hong Kim),고국원(Kuk Won Ko) 제어로봇시스템학회 2009 제어·로봇·시스템학회 논문지 Vol.15 No.9
This paper presents a manipulation system consisting of a coarse/tine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The tine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and tine manipulation of micro parts.