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이창현,배강,진익현,김화민,손선영 한국물리학회 2015 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.67 No.6
Al-doped ZnO (AZO) films were deposited on glass, polyethylene naphthalate (PEN) and polyethylene terephthalate (PET) at room temperature by using conventional rf-magneton sputtering (CMS) and a facing-target sputtering (FTS) with hetero targets of Al2O3 and ZnO. Their structural, surface morphology, electrical and optical properties were characterized by using X-ray diffractometry (XRD), atomic force microscopy (AFM), Hall-effect measurement and ultravioletvisible spectrophotometry, respectively. The films exhibit highly c-axis preferred orientation and a closely packed nanocrystalline. Structure the FTS-films deposited on plastic substrate are found to receive much less stress due to bombardment of high-energy particles compress to the CMS-films deposited on plastic substrates, during the sputtering process, which can enhance the electrical properties and crystalline quality of the FTS-films compared with those of the CMS-films. The resistivities of the FTS-films are 6.50 × 10−4 ·cm on glass, 7.0 × 10−4 ·cm on PEN and 7.4 × 10−4 ·cm on PET while the values for the CMS-films are 7.6 × 10−4 ·cm on glass, 1.20 × 10−3 ·cm on PEN and 1.58 × 10−3 ·cm on PET.
플라즈마 에칭공정에 따른 산화물 박막의 광촉매 표면 특성
이창현,서성보,오지용,진익현,손선영,김화민,Lee, Chang-Hyun,Seo, Sung-Bo,Oh, Ji-Yong,Jin, Ik-Hyeon,Sohn, Sun-Young,Kim, Hwa-Min 한국전기전자재료학회 2015 전기전자재료학회논문지 Vol.28 No.5
$WO_3$, $SiO_2$, and $TiO_2$ films with hydrophilic property are deposited by rf-magnetron sputtering. Their wettability is strongly depends on the presence or absence of the oxygen plasma etching on the glass substrates. The $TiO_2$ film of 50 nm-thick on the plasma etched glass shows a water contact angle (WCA) below $5^{\circ}$ which means a super-hydrophilic surface. However, WCA values are gradually degraded when the films are exposed under atmosphere, especially $WO_3$. In order to improve hydrophilic property, the degraded films can be again recovered by UV illumination for 10 sec using UV-light and the $TiO_2$ film shows a super-hydrophilic surface about $3^{\circ}$.