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[InAs/GaSb] 응력 초격자에 기초한 [320×256]-FPA 적외선 열영상 모듈 제작
이상준,노삼규,배수호,정한,Lee, S.J.,Noh, S.K.,Bae, S.H.,Jung, H. 한국진공학회 2011 Applied Science and Convergence Technology Vol.20 No.1
An infrared thermographic imaging module of [$320{\times}256$] focal-plane array (FPA) based on [InAs/GaSb] strained-layer superlattice (SLS) was fabricated, and its images were demonstrated. The p-i-n device consisted of an active layer (i) of 300-period [13/7]-ML [InAs/GaSb]-SLS and a pair of p/n-electrodes of (60/115)-period [InAs:(Be/Si)/GaSb]-SLS. FTIR photoresponse spectra taken from a test device revealed that the peak wavelength (${\lambda}_p$) and the cutoff wavelength (${\lambda}_{co}$) were approximately $3.1/2.7{\mu}m$ and $3.8{\mu}m$, respectively, and it was confirmed that the device was operated up to a temperature of 180 K. The $30/24-{\mu}m$ design rule was applied to single pixel pitch/mesa, and a standard photolithography was introduced for [$320{\times}256$]-FPA fabrication. An FPA-ROIC thermographic module was accomplished by using a $18/10-{\mu}m$ In-bump/UBM process and a flip-chip bonding technique, and the thermographic image was demonstrated by utilizing a mid-infrared camera and an image processor. InAs/GaSb 제2형 응력초격자(SLS)를 활성층에 탑재한 [$320{\times}256$] 초점면 배열(FPA) 적외선 열영상 모듈을 제작하고 열영상을 구현하였다. p-i-n형으로 설계된 소자의 활성층(i) 구조는 300 주기의 [13/7]-ML [InAs/GaSb]-SLS로 구성되어 있고, p와 n 전극층에는 각각 60주기의 [InAs:Be/GaSb]-SLS와 115 주기의 [InAs:Si/GaSb]-SLS 구조를 채용하였다. 시험소자의 광반응(PR) 스펙트럼으로부터 피크 파장(${\lambda}_p$)과 차단 파장(${\lambda}_{co}$)은 각각 ${\sim}3.1/2.7{\mu}m$과 ${\sim}3.8{\mu}m$이고 180 K 온도까지 동작을 확인하였다. 단위 화소의 간격/메사는 $30/24{\mu}m$ 규격으로 설계되었으며, [$320{\times}256$]-FPA는 표준 광묘화법으로 제작하였다. $18/10{\mu}m$의 In-bump/UBM 공정과 flip-chip 결합 기술을 적용하여 FPA-ROIC 열영상 모듈을 완성하였으며, 중적외선용 영상구동 회로 및 S/W를 활용하여 열영상을 시연하였다.
정한,송은영,최규리,이용호,이장로,김미양,최수정 숙명여자대학교 자연과학연구소 1995 자연과학논문집 Vol.- No.6
We try to analysis comparing the measurements by wheat-stone bridge method at room temperature of the magnetoresistance (MR) measured with the current in the layer planes (CIP) and the current perpendicular to the layer planes (CPP) for the samples that we prepare equal and unequal thickness Ag/Co multilayers on glass substrates in a vacuum of ?? Torr by a thermal vacuum evaporation method. We try to consider the correlation between the magnetoresistance curve obtained from X-Y recorder and the magnetic hysteresis curve examined by vibrating sample magnetometer for the CIP and the CPP each other. The MR(H) curves are similar in shape for the CPP and CIP orientations, and also the magnetic fields, ?? in which MR peaks appear are nearly same for each orientation. Maximum MR dadas for the CIP and the CPP (CIP-MR, CPP-MR) with varing Ag thickness show the same variation, and unlike Fe/Cr or Co/Cu, the Ag/Co multilayers do not oscillate with Ag thickness. The CPP-MR appear from 1 times to 6 times as large as the CIP-MR for the same samples.