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정상화(Sanghwa Jeong),최석봉(Sukbong Choi),김광호(Gwangho Kim),박준호(Junho Park) 한국생산제조학회 2005 한국공작기계학회 추계학술대회논문집 Vol.2005 No.-
As demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. The ultra precision stage wasn't yet applied in the optical alignment and the optical element alignment was taken too many times. In this paper, the optical element alignment of multi-axis ultra precision stage was studied. The procedure of the alignment algorithms applied to the ultra precision multi-axis stage are developed by LabView programming.