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원자현미경을 이용한 나노구조체의 각도측정 방법 및 조건
조상준(Cho Sang-Joon),안병운(Ahn Byung-Woon),김준휘(Kim Joonhui),정상한(Chung Sang Han) 표준인증안전학회 2012 표준인증안전학회지 Vol.2 No.1
Invention of the atomic force microscopy (AFM) has provided a powerful measurement capability for sub-nano scale science and technology. Since invention, AFM has been significantly improved, and numerous innovative mechanisms and measuring modes have been developed. As the progress of miniaturization in patterns and photoresist structures in semiconductor, microelectronics, and glass industry, along with the fast advance of the extremely versatile nanotechnology applications, in a great number of industrial processes calls for reliable and comparable quantitative dimensional measurements in the micro- and submicrometer range. To make matters worse, there has been an increasing demand for measuring characteristics of sidewalls like line edge and line width roughness, wave pattern of sidewalls and angles of overhang features. Realizing that currently available CD-AFM or CD-SEM techniques do not satisfy this demand, new measurement standards are required for angles of micro- and nano-structures. In spite of the many capabilities of AFM, quite a few conditions have to be considered to measure critical dimensions (CD) quantitatively with repeatability and reproducibility. Piezo hysteresis, drift, tip shape and consistency, scanner orthogonality and other things are included in the conditions. The requirements and process to measure critical angle of nano- and micro-structure using AFM will be described in this paper.
비행체 조종면에 작용하는 힌지 모멘트의 시험적 측정 방법 연구
박종민(Jong-Min Park),정상준(Sang-Joon Chung) 한국항공우주학회 2012 韓國航空宇宙學會誌 Vol.40 No.2
본 논문에서는 비행체 날개의 조종면에 작용하는 힌지 모멘트 분석을 위한 시험적 방법 및 결과를 수록하였다. 비행 공력 하중에 의하여 조종면에 힌지 모멘트가 작용할 경우, 조종면 구동장치에서 측정된 각도와 실제 조종면의 각도 사이에 탄성 변형에 의한 차이가 발생하며, 이 차이를 측정하여 힌지 모멘트로 환산할 수 있다. 이를 위하여 지상에서 조종면 구동장치 시스템의 비틀림 강성을 측정하기 위한 정하중 시험 및 조종면 각도 센서 교정시험을 수행하였다. 이 결과를 이용하여 비행 중 작용하는 힌지 모멘트를 계산할 수 있으며, 또한 체결부위의 미끄러짐 및 백래시 등의 기계적 오차도 예측할 수 있다. 실제 비행 시험 결과를 이용하여 조종면에 작용한 힌지 모멘트를 계산한 결과와 수치 해석 결과의 비교를 통하여, 제시된 하중 측정 방법의 타당성을 입증하였다. This paper contains the test method to obtain aerodynamic hinge moments acting on the control surface of air vehicle wing. During the flight, hinge moments make difference between actual control surface angle and control angle which is measured by sensor of actuator. The hinge moments can be obtained by using this difference. Static ground load test and calibration test were conducted to obtain torsional stiffness of control surface actuation system. This results are used to calculate hinge moments. In addition, the mechanical errors of actuation system such as slip angle of mounting point and backlash could be estimated. Using flight test results, this experimental measurement method of hinge moment acting on control surface is conducted. The results of this method are similar to those of numerical simulation method, and the validity of this method is proved.