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대면적 플랫폼을 갖는 정전형 2 축 MEMS 스테이지의 설계
정일진(I. J. Chung),전종업(J. U. Jeon),백경록(K. L. Baeck),박규열(K. Y. Park) 한국정밀공학회 2004 한국정밀공학회 학술발표대회 논문집 Vol.2004 No.10월
Recently the electrostatic 2-axis MEMS stages have been fabricated for the purpose of an application to PSD (Probebased Storage Device). However, most of them have low area efficiency, which is undesirable as data storage devices, since all of the components (springs, comb electrodes, anchors, platform, etc.) are placed in-plane. In this paper, we present a novel structure of electrostatic 2-axis MEMS stage that is characterized by having large area platform. For large area efficiency, the actuator part consisting of mainly comb electrodes and springs is placed right below the platform. In this article, the structures and operational principle of the MEMS stages are described, followed by design procedure, structural and modal analysis using FEM(Finite Element Method). The area efficiency of the MEMS stage was designed to be about 55%, that is very large compared with conventional ones having a few percentage.
백봉우(B. W. Baik),전종업(J. U. Jeon),박규열(K. Y. Park) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
A new method for the electrostatic suspension of disk-shaped objects is proposed which is based on a time-optimal control scheme and deploys only high-voltage power supplies that can deliver dc voltages of positive and/or negative polarity. This method possesses the unique feature that no high-voltage amplifiers are needed which leads to a remarkable system simplification and objects can be suspended stably even in vacuum environment. Using this scheme, an Aluminium disk employed in a 3.5-inch HDD was suspended stably at an airgap of 0.3㎜.
SIDM(Smooth Impact Drive Mechanism)을 이용한 초정밀 회전기구에 대한 연구
이상욱(S. Lee),전종업(J. U. Jeon),박규열(K. Y. Park),부경석(K. S. Boo) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
This paper represents a ultra precision rotational device where the smooth impact drive mechanism(SIDM) is utilized as a driving mechanism. Linear motions of piezoelectric elements are converted to the rotational motion of disk by frictional forces generated between the rotational disk and the friction bars which are attached to the piezoelectric elements. This device was designed to drive a rotational disk using slip-slip motion mechanism based on stick-slip motion mechanism. Experimental results show that the angular velocity was increased in proportion to the magnitude of supplied voltage to piezoelectric element. In our device, the smooth rotational motion was obtained when the driving frequency has been reached to 500㎐ under the driving voltage of 100V. The amount of step movement has been revealed to be 3.44×10?⁴ radian.