http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
반도체 구리 배선공정에서 표면 전처리가 이후 구리 전해/무전해 전착 박막에 미치는 영향
임태호,김재정,Lim, Taeho,Kim, Jae Jeong 한국전기화학회 2017 한국전기화학회지 Vol.20 No.1
This study investigated the effect of surface pretreatment, which removes native Cu oxides on Cu seed layer, on subsequent Cu electro-/electroless deposition in Cu interconnection. The native Cu oxides were removed by using citric acid-based solution frequently used in Cu chemical mechanical polishing process and the selective Cu oxide removal was successfully achieved by controlling the solution composition. The characterization of electro-/electrolessly deposited Cu films after the oxide removal was then performed in terms of film resistivity, surface roughness, etc. It was observed that the lowest film resistivity and surface roughness were obtained from the substrate whose native Cu oxides were selectively removed. 본 연구에서는 구리 배선 공정에서 구리 씨앗층 표면에 형성되는 구리 자연산화물을 제거하는 표면 전처리가 후속 구리 전착에 미치는 영향을 살펴보았다. 구리 배선 공정의 화학적 기계적 연마 공정에서 사용하는 citric acid 기반의 용액을 구리 표면 전처리 과정에 적용하여 표면에 존재하는 구리 자연 산화물을 제거하였고, 용액 조성 변화를 통해 산화물 제거의 선택성을 높여 구리 씨앗층의 손실을 최소화하였다. 또한 표면 전처리 후 구리 전해 전착과 무전해 전착을 시도하여 전착한 박막의 비저항, 표면 거칠기 등의 성질을 비교하고, 이를 통해 선택적으로 구리 산화물을 제거한 이후에 전착된 박막의 비저항과 표면 거칠기가 가장 낮게 나타남을 확인하였다.
임태호,오재훈,조영석,강형구,김원희,지영준,송영탁,김인영,이준철 연세대학교의과대학 2016 Yonsei medical journal Vol.57 No.2
Purpose: During cardiopulmonary resuscitation (CPR), chest compression (CC) depth is influenced by the surface on which the patient is placed. We hypothesized that training healthcare providers to perform a CC depth of 6–7 cm (instead of 5–6 cm) on a manikinplaced on a mattress during CPR in the hospital might improve their proper CC depth. Materials and Methods: This prospective randomised controlled study involved 66 premedical students without CPR training. The control group was trained to use a CC depth of 5–6 cm (G 5–6), while the experimental group was taught to use a CC depth of 6–7 cm (G 6–7) with a manikin on the floor. All participants performed CCs for 2 min on a manikin that was placed on a bed 1 hour and then again 4 weeks after the training without a feedback. The parameters of CC quality (depth, rate, % of accurate depth) were assessed and compared between the 2 groups. Results: Four students were excluded due to loss to follow-up and recording errors, and data of 62 were analysed. CC depth and % of accurate depth were significantly higher among students in the G 6–7 than G 5–6 both 1 hour and 4 weeks after the training (p<0.001), whereas CC rate was not different between two groups (p>0.05). Conclusion: Training healthcare providers to perform a CC depth of 6–7 cm could improve quality CC depth when performing CCs on patients who are placed on a mattress during CPR in a hospital setting.
Near-Infrared Reflective Dark-Tone Bilayer System for LiDAR-Based Autonomous Vehicles
임태호,배성희,유성호,백경열,조상호 한국고분자학회 2022 Macromolecular Research Vol.30 No.5
Light Detection and Ranging (LiDAR) is a representative sensor for autonomous v ehicles (AVs) by r ecognizing surrounding obj ects through d etecting the reflected near-infrared (NIR) light. However, this sensor has a weakness in recognizing the conventional carbon black-based dark-tone cars due to their low NIR reflectance. This cognitive impairment is a potential factor in a car accident in the AV system. Therefore, it is necessary to develop a dark-tone paint that can be applied to LiDAR by reflecting NIR. In this work, we developed a NIR reflective dark-tone bilayer system. As the bottom layer (surfacer layer), we used a conventional NIR-reflective surfacer. For the dark-tone top layer (basecoat layer), organic pigment-based paints were prepared. Various combinations of organic pigments such as perylene, copper(II) phthalocyanine, perylene diimide derivatives were studied to give a dark tone. After optimization, the developed bilayers exhibited dark tone with low L* values (less than 25) and high reflectance in the NIR region, over 60%, especially at 905 nm. Therefore, we expect the developed bilayer system to be applied as a dark-tone paint detectable by LiDAR.