Sol - Gel 법에 의한 PbZrO3 - PbTiO3 - Pb(Ni1/3Nb2/3)O3 박막의 물리적 특성

임무열,구경완,김성일,유영각 ( Moo Yeol Lim,Kyung Wan Koo,Sung Il Kim,Young Kag Yoo ) 한국전기전자재료학회 1996 전기전자재료학회논문지 Vol.9 No.10

Sol-Gel 법에 의한$ PbZrO_3$-$PbTiO_3$-$Pb(Ni_{1/3}Nb_{2/3})O_3$

임무열,구경완,한상옥 한국전기전자재료학회 1997 電氣電子材料學會誌 Vol.10 No.2

PbTiO$_{3}$-PbZrO$_{3}$-Pb(Ni$_{1}$3/Nb $_{2}$3/O$_{3}$)(PZT-PNN) thin films were prepared from corresponding metal organics partially stabilized with diethanolamine by the sol-gel spin coating method. Each mol rates of PT:PZ:PNN solutions were #1(50:40:10), #2(50:30:20), #3(45:35:20) and #4(40:40:20), respectively. The spin-coated PZT-PNN films were sintered at the temperature from 500.deg. C to 600.deg. C for crystallization. The P-E hysteresis curve was drawn by Sawyer-Tower circuit with PZT-PNN film. The coercive field and the remanent polarization of #4(40:40:20 mol%) PZT-PNN film were 28.8 kV/cm and 18.3 .mu.C/cm$^{2}$, respectively. Their dielectric constants were shown between 128 and 1120, and became maximum value in MPB(40:40:20 mol%). The leakage currents of PZT-PNN films were about 9.4x 10$^{-8}$ A/cm$^{2}$, and the breakdown voltages were about 0.14 and 1.1 MV/cm. The Curie point of #3(45:35:20 mol%, sintered at 600.deg. C) film was 330.deg. C.

Sol - Gel 법에 의한 PbZrO3 - PbTiO3 - Pb ( Ni1/3Nb2/3 ) O3 박막의 전기적 특성

임무열,구경완,한상옥 ( Moo Yeol Lim,Kyung Wan Koo,Sang Ok Han ) 한국전기전자재료학회 1997 전기전자재료학회논문지 Vol.10 No.2

奚琴의 音響學的 特性

임무열,윤화중,Lim, Moo-Yeol,Yoon, Wha-Joong 한국음향학회 1990 韓國音響學會誌 Vol.9 No.3

奚琴 音質의 音響學的 特性을 조사하기 위해 奚琴音의 파워스펙트럼과 時間波形을 FFT Analyzer를 이용하여 분석하였다. 奚琴絃의 張力과 遠山(bridge)의 위치, 腹板(top plate)의 두께등을 변화시키면서 분석을 하였다. 실험에 의하여 다음과 같은 결론을 얻었다. 腹板의 共振周波數가 絃의 基音의 周波數보다 높기 때문에, 基音의 音壓보다 腹板의 共振周波數 부근의 上音들의 音壓이 더 큼을 알았다. 絃의 張力이 강할 때와 遠山이 腹板의 중앙에 위치하였을 때가 音質이 보다 우수하였다. 奚琴 遊絃의 inharmonicity 계수는 0.049 cents/$n^2$이었다. 5kHz 이상의 上音은 발견할 수 없었으며, 奚琴의 inharmonicity가 violin의 inharmonicity보다 큰 값을 나타내었는데 이를 통해 奚琴음의 明瞭度와 豊富性이 부족하다는 것을 알 수 있었다. 奚琴筒의 共振周波數(MAR)와 腹板의 共振周波數(MWR)의 周波數比는 1 octave 정도일 때 奚琴이 가장 좋은 음색을 갖는다는 것을 밝혔으며 이때 腹板의 두께는 4.5mm 정도이다. In order to investigate the acoustical characteristics of the Hae-keum (Korean traditional musical instrument) tone quality, the spectrum and wave form of Hae-keum sounds were analyzed by the FFT Analyzer. The analysis was carried out by the varying of the tension of Hae-keum strings, the positions of bridge and the top plate's thickness of Hae-keum respectively. According to the experiment, the following results are obtained ; the over tone's amplitude nearby the top plate resonance frequency is greater than the fundamental tone's amplitude because the top plate resonance frequency is higher than the fundamental tone's frequency. Tone qualities are better when the bridge is situated in the middle of top plate and the tension of strings is larger. The inharmonicity coefficient of the Hae-keum's second string is 0.049 cents/$n^2$. The brilliance and richness is poor, because we seldom found the over tone over 5kHz and the inharmonicity of the Hae-keum is greater than that of a violin. Also we confirmed that we are able to get the best tone quality in 4.5mm thickness of the Hae-keum's top plate.

졸-겔법에 의한 PZT-PNN 薄膜의 特性

임무열,구경완 永同工科大學校 1995 硏究論叢 Vol.1 No.1

유기금속을 사용한 졸-겔 스핀 코팅법으로 PZT-PNN 박막을 제조하였으며, diethanolamine을 안정화물질로 사용하였다. PT:PZ:PNN의 코팅 용액의 mol%는 각각 #1(50:40:10), #2(50:30:20), #3(45:35:20), #4(40:40:fO), f5(40:50:10), #6(35:45:20) 그리고 #7(30:50:20)으로 제조하였다. 스핀 코팅된 박막의 잔류 유기물을 제거하기 위해 350t에서 예비소결을 하였고, 박막의 결정화를 위해 450℃~ 700℃에서 소결하였다. 백금 기판과 Pt/TiN/Ti/TiN/Si 기판 위에 박막을 성장하였으며, 500℃의 소결에서도 perovskite 상이 출현하였다. 결정성이 가장 양호한 소결온도는 700℃이었다. Sawyer-Tawer 회로를 이용하여 박막위 P-E 이력곡선을 관찰하였다. 박막의 항전계와 잔류분극은 각각 28.8 ㎸/㎝과 18.3 uC/㎠이었다. 유전상수 k는 128 ~ 1120의 값을 나타내었고, 상경계(40:40:20 ㄹmol%)에서 최대값을 보여주었다. 박막의 진성파괴전압은 27.0 ~ 60.0 ㎹/m이었으며, 소결온도가 올라갈수록 파괴 전압은 낮아지는 경향을 나타내었다. PbTiO_3-PbZrO_3-Pb(Ni_1/3Nb_2/3O_3)(PZT-PNN) thin films were been prepared from corresponding metal organics partially stabilized with diethanolamine by the sot-gel spin coating method. The each mol rates of PT:PZ:PNN solutions were #1(50:40:10), #2(50:30:20), #3(45:35:20), #4(40:40:20), #5(40:50:10), #6(35:45:20) and #7(30:50:20) respectively. The spin-coated PZT-PNN films were heat-treated at 350t for decomposition of residual organics, and were heat-treated at temperature between 450t and 750t for crystallization. The substrates, such as Pt and Pt/TiN/Ti/TiN/Si were used for the spin coating of PZT-PNN films. The perovskite phase was observed in the PZT-PNN films which were heat-treated at 500℃ The crystallization of the PZT-PNN films was optimized at 700℃ of sintering temperature. The P-E hysteresis curve was drawn by Sawyer-Tower circuit with PZT-PNN film. The coercive field and the remanent polarization of PBT-PNN film was 28.8 ㎸/㎝ and 18.3 uC/㎠ respectively. Its dielectric constants were shown between 128 and 1120, and become maximum value in MPB. The break down voltages of PZT-PNN films were shown between 27.0 and 60.0 ㎹/m.

Sol-gel법에 의한 $PbZrO_3-PbTiO_3-Pb(Ni_{1/3}Nb_{2/3})O_3$박막의 물리적 특성

임무열,구경완,김성일,유영각 한국전기전자재료학회 1996 電氣電子材料學會誌 Vol.9 No.10

PbTiO$_{3}$-PbZrO$_{3}$-Pb(Ni$_{1}$3/Nb$_{2}$3/O$_{3}$) (PZT-PNN) thin films were prepared from corresponding metal organics partially stabilized with diethanolamine by the sol-gel spin coating method. Each mol ratio of PT:PZ:PNN solutions were #1(50:40:10), #2(50:30:20), #3(45:35:20), #4(40:40:20), #5(40:50:10), #6(35:45:20) and #7(30:50:20) respectively. The spin-coated PZT-PNN films were heat-treated at 350.deg. C for decomposition of residual organics, and were sintered from 450.deg. C to 750.deg. C for crystallization. The substrates, such as Pt and Pt/TiN/Ti/TiN/Si were used for the spin coating of PZT PNN films. The perovskite phase was observed in the PZT-PNN films heat-treated at 500.deg. C. The crystalline of the PZT-PNN films was optimized at the sintering of 700.deg. C. By the result of AES analysis, It is confirmed that the films of TiN/Ti/TiN was a good diffusion barrier and that co-diffusion into the each films was not observed.

보령 다목적댐 건설사업으로 인한 환경 소음의 측정 및 평가

윤화중,강 호,임무열 忠南大學校 環境問題硏究所 1995 環境硏究 Vol.13 No.-

The environmental noise was measured in the construction site of Poryung multipurpose dam. The noise measurements indicate that the average energy equivalent sound level (Leq) were 56.14 dB(A) in 1994 and 58.09 dB(A) in 1995 respectively. These value are lower than the environmental noise standard of 65 dB(A).

대전 3ㆍ4 공업단지 일대의 소음 특성

임무열,강호 忠南大學校 環境問題硏究所 1996 環境硏究 Vol.14 No.-

The living noise was investigated around the Taejon 3th and 4th industrial complex in August and November 1996. The noise level in A-1 place was over the living noise exhaust standard. The noise levels in A-2 and A-3 place were less than the living noise exhaust standard. The noise spectrum of the incinerator in A-1 place indicate harmonic structure of which fundamental frequency was 80-100 Hz. The noise spectrum in A-2 place indicate white noise spectrum.

졸겔법으로 제작한 PZT-PNN 박막의 전기적 특성

윤화중,임무열,구경완 충남대학교 기초과학연구소 1995 忠南科學硏究誌 Vol.22 No.2

PbTiO_3-PbZrO_3-PbNi_1/3Nb_2/3O_3(PZT-PNN) thin films have been prepared from corresponding metal organics partially stabilized with diethanolamine through the sol-gel spin coating process. The each mol rates of PT:PZ:PNN sol solutions were #1(50:40:10), #2(50:30:20), #3(45:35:20) and #4(40:40:20). The spin-coated PZT-PNN films were heat-treated at 350℃ for decomposition of residual organics, and were heat-treated at temperature between 450℃ and 750℃ for crystallization. The substrates, such as Pt and Pt/TiN/Ti/TiN/Si were used for the spin coating of PZT-PNN films. The perovskite phase was observed in the PZT-PNN films which were heat-treated at 500℃. The crystallization of the PZT-PNN films was optimized at 700℃ of sintering temperature. The P-E hysteresis curve was drawn by Sawyer-Tower circuit with PZT-PNN film. The coercive field and the remanent polarization of PZT-PNN film was 28.8 kV/㎝ and 18.3 μC/㎠ respectively. Its dielectric constants K were shown between 128 and 1120, and become maximum value in MBP. The Curie pont of PZT-PNN film indicated 330℃ according to the measurement of dielectric constant. The break down voltages of PZT-PNN films were shown between 27.0 and 60.0 MV/m.

DEA 첨가 금속 Alkoxide를 사용한 PZT 박막의 제조 및 특성 평가

윤화중,임무열,구경완,최명진 충남대학교 기초과학연구소 1994 忠南科學硏究誌 Vol.21 No.1

Lead acetate trihydrate, zirconium iso-propoxide and titanium iso-propoxide used for the starting material to fabricate PZT coating solution. Iso-metoxy-ethanol used for the solvent of the starting material. Adding diethanolamine formed the chelate compound and prevented the hydrosis of coating solution. The coating sol solution is changed to M-O-M structure polymer gel by adding H_2O, and the polymer gel has the more strong bonding force. The cross-sectional SEM micrograph of PZT thin film showed that the metal of lower electrode was silicated with SiO_2 of buffer layer. The SIMS depth profile for PZT thin film indicated that the metal of lower electrode and silicon was diffused up to the upper part of PZT thin film. For the X-RD data of PZT thin film, the thin film on Pt substrate and with Ti buffer layer had strong perovskite phase. The PZT thin films measured by Sawyer-Tower circuit showed feroelectric characteristic representating D-E hysterisis curve. The remanent polarization and coercive field of the film was 1.92 C/㎠ and 33.3kV/㎝. I-V characteristic curve showed that the leakage currents and break down voltages of PZT thin films on Ni/SiO_2/Si, Ti/SiO_2/Si, Pt/SiO_2/Si substrate was 1.43 × 10 exp (-10) A/㎠, 1.19×10 exp (-10) A/㎠, 2.28×10 exp (-10) A/㎠ and 0.334 MV/㎝, 0.33 MV/㎝, 0.11 MV/㎝ each. C-V curve indicated dielectric constant 57 The resistance antiresonance frequency of PZT film was 612 ㎒, and the resistance was 14 ㏀ at that frequency.