Cu/low k BEOL에서의 식각 후처리 세정공정 및 세정액 특성연구

李珍旭 강원대학교 대학원 2008 국내석사

Low K dielectric 재료의 채택이 Cu BEOL에서 일반화됨에 따라서 불소(F)기반 세정공정이 엄격한 critical dimension 조절이 요구되는 첨단 세저시스템에 적합하지 않다는 점이다. 이문제를 해결하는 관건은 세정화학액의 선택비 제어성이다. Cu와 low k dielectric 박막의 확대 적용되면서 반도체 제조공정에서 습식 포토레지스트제거 방식이 부활할 것으로 보인다. 이에 따라 본 연구는 Cu damascene 공정을 성공적으로 수행하기 위하여 Cu의 부식 critical dimension의 손실방지 및 low k dielectric 박막의 특성열화가 억제되어야 하는 특수성에 기반하여 다양한 low k dielectric 재료에 대한 세정공정 적합성을 판단함과 동시에 Cu post residue의 제거능력을 갖추는 세정액 개발에 그 목표를 두었다. 이에 따라 Cu BEOL의 post etch cleaning용 세정액 성분 특성을 평가하였다. 세정액 성분들의 Cu post etch residue에 대한 세정특성평가를 통해 각각의 세정성분이 갖고 있는 세정능력을 공정변수에 따라 확인하여 선별하였으며 세정액 성분들의 low k dielectric특성에 미치는 영향성 분석을 위해 Coral, FSG등의 low k dielectiric 재료의 적합성을 판단하였다. 이를 위해 wafer의 두께 변화 및 표면 거칠기 분석을 통하여 세정액 성분들의 특성을 판단하였다. 혼합세정액의 공정변수에 따른 Cu post etch residue 제거특성 분석평가를 통해 높은 온도와 공정시간의 증가에 따라 그 용해도가 증가함을 알 수 있었으며 공정 적합성을 고려하여 25℃, 10min의 공정조건을 탐색하였다.이를 바탕으로 혼합세정액을 제조하여 Cu BEOL 공정적용 및 신뢰성을 분석하였다. Cu BEOL 공정적용에 따른 공정적합성 판단을 위해 소자업체에서 제공된 patterned wafer에 직접 적용하여 그 적합성을 분석하였다. 분석을 위해 FE-SEM, Elipsometry, 표면 거칠기 분석 등을 통하여 그 공정 적합성을 판단하였다. 또한 기존 세정액들과의 비교 분석을 위해 업체에서 제공된 시제품들과의 비교분석을 통하여 그 가능성을 판단하였다. 제조된 혼합세정액은 탐색된 25℃, 10min의 공정조건에서 뚜렷한 세정능력을 확인할 수 있었으며, 기존의 세정액과의 세정능력 비교 평가에서 분석 부분에 대한 세정능력이 우수함을 알 수 있었다.

태안 기름유출 사고 메모리얼 공원 설계

이진욱 서울대학교 대학원 2008 국내석사

(A)Novel molecular dynamics simulation method for calculating the rate coefficient of diffusion influenced enzymatic reaction

이진욱 서울大學校 大學院 2006 국내박사

현대공간디자인에서 나타나는'非물질성'의 표현특성에 관한 연구

이진욱 서울대학교 대학원 2006 국내석사

피에조 디젤 인젝터의 구동성능 및 분무특성과 캐비테이션 유동에 관한 연구

이진욱 서울대학교 2005 국내박사

북한의 화폐개혁에 관한 연구

이진욱 동국대학교 2014 국내석사

North Korea's currency has been regarded as a ' transitional' presence. That is the role of the currency was limited, and in the economic sector, the non-cash circulation transactions accounted for most of the household, and it's only a fraction of the wages paid in the course of the life through the currency, including transactions. Looking at the past history of North Korea, they implemented the currency reform for the needs of the time. The first currency reform was implemented in 1947 to liquidate the remnants of the colonial period and the need to establish an independent monetary system was raised by. However, the liquidation of Soviets military payment certificate(mpc) caused the facts that the burden of the liquidation passed to North korean and the North-South economic was divided and become two lock-in. In 1959, The second currency reform was implemented to rerate the price of the property. In addition, the purpose of the reform is the modification of the monetary system in confusion at the post-war economic circumstances, and because of the economic condition at that time, the monetary system needs the modification. The third currency reform was implemented in 1979, the main feature of this period is the increase of the currency design related Kim Il-song’s contents. Workers and farmers be used until Kim Il-song mainly appeared, this period is called “The period of establishing the political system of Kim Il-Sung” the two issues are interlinked. The fourth currency reform was implemented in 1992. In the 1990s, the economic crisis is deepening as a result of the planned economy is paralyzed and the residents to survive had to capitalize on Economic Affairs area. Under these circumstances, North Korea implements monetary reform and try to prevent the spread of the principle of free markets. but the monetary reform failed. Because of the paralysis of a planned economy, the Distributor becomes nominal. And natural disasters occurred in succession, many victims of starvation occurred for a period of “The Arduous March”. In 2009, 5th-currency reform was implemented for the establishment of the successor system, restoration of planned economy and prevention of the spread of the principle of free markets. But 5th-currency reform failed. Marketization Already proliferated. And because of the lack of supply, it makes chaos in residents life.

環境葛藤 解消에 관한 法的 硏究

이진욱 東國大學校 2007 국내박사

One of the most pressing issues in our society these days are social conflicts and their solution. People are sometimes described as 'homo conflitus'. Conflicts exist in every society and at any time. Arguments and dispute are inherent in human society. If conflict is not properly managed, it can generate violence and lead to the destruction of a community. Protracted conflict in various areas has proven unproductive and costly in terms of human life and economic losses. In recent years, social recognition on seriousness of environmental conflicts has grown and accordingly, resolving those conflicts are in great demand. However, practical and effective conflict resolution programs have not been introduced. These environmental conflicts and disputes result in project delay and socially-ill effects such as social costs incurred by unproductive disputes, distrust on the government, and clash among the stake-holders. The purpose of this study is to analyze the causes of environmental conflicts, to identify legislative system that needs improvement, and to set the basic direction for conflict resolution through examining environmental conflict cases selected by 'The Participatory Government'. These Damages of environmental pollution show characteristics as follow: (1) commonness of damage (2) wideness of damage (3) Local generalization and quantitative extension (4) regional substitution (5) making profits of wrongdoing (6) continuation and accumulation of damage. According to causes of conflict, environmental conflicts can be classified into conflict on values, conflict on interests, conflict on facts, and conflict on structure. Value conflict reflects confrontation between development and preservation. Fact conflict is related to uncertainty of information and knowledge on environment. Conflict on facts occurs especially when dealing with a large-scale project where we are not able to accurately measure the degree and scope of conflicts. Lastly, structural conflict can be resolved to some degree by reorganizing systems and putting sensible and transparent process in place. Environmental conflict cases that 'The Participatory Government' has faced are all featured by four causes of conflict mentioned above. To take Seoul Ring Road and Gyeongbu rapid-transit railway for example, the aspect of value conflict has become an issue when the aspect of interest is insignificant. Other cases such as Gyeongin canal, Saemangeum, Bu-an, and Han-tan river reflect the aspects of both the value conflict and interest conflict together. To some degrees, fact conflict and structural conflict appear in all the cases. For most disputed environmental conflict cases, it is not easy to judge validity or discriminate between truth or error. To ease and resolve environmental conflicts, we need to set up a cooperative framework for mutual agreement on a long term basis. In order to achieve this, Strategic Environmental Assessment needs to be introduced by modifying the current Environmental Impact Assessment and Prior Environmental Review System. In addition, we need to encourage citizens to participate in planning and implementation of business projects or programs from the early stages of a development activity. Since every environmental conflict can not be prevented, ex post facto conflict system can be considered. When the government gets involved as one of the stake-holders in environmental conflicts such as Gyeongin Canal, Bu-an, and Han-tan river, National Environmental Dispute Resolution Commission is not able to play a role of mediator. Therefore, the establishment of the third party that can mediate conflicts when the government becomes a stake-holder is necessary. It is desirable to consider establishing a third party mediator in the contex of alternative means of dispute resolution. Enactment of the 'Conflict Management Fundamental Law'(a provisional name) and the Establishment of 'Conflict Management Support Center'(a provisional name), that are presently driven by the Presidential Commission on Sustainable Development, will be the first step in institutionalization of Alternative Dispute Resolution. Consequently, damages due to environmental pollution is that the legal and administrative efforts for protection of environment doesn't mean anymore, finally it depends on how the relief works effectively. In order to get effectiveness on duty relief of environmental dispute, the problems of management in the reconciliation system of environment dispute as well as administrative suit of environment, and making endeavor to improve through active interpretation of court and it process should be required.

PainVision을 활용한 실시간 전기자극 강도 상승에 따른 생체신호 변화 분석 연구

이진욱 동국대학교 일반대학원 2022 국내석사

A subjective method is mainly used to evaluate the degree of pain, and it is difficult for patients who cannot express themselves in language to evaluate pain. In particular, it is more vulnerable to certain groups with communication disorders, such as the elderly with dementia and vegetative humans. Therefore, an experiment was conducted by seeking a method for objectively evaluating pain. In this study, basic research was performed for objective pain evaluation by confirming changes in biosignals through electrical stimulation. This experiment was conducted with the approval of Dongguk University's Institutional Review Board(IRB), and the study subjects were normal people in their 20s and 30s (average age 28.9 years). For the experimental method, progressively ascending electrical stimulation was applied to the right arm using PainVision PS-2100 equipment, and photoplethysmography (PPG) and Electrodermal activity (EDA) biosignals were measured on the left arm using Biopac mp36. When a test subject could not tolerate a progressively increasing electrical stimulation, the stop switch was pressed, and the PPG amplitude, PPG Peak to Peak Interval (PPI), and EDA data values were compared at the start and end points of the electrical stimulation. As a result of the experiment, it was confirmed that both PPG and EDA biosignals were changed by electrical stimulation. From the results of this study, biosignal changes due to stimulation can present data that are fundamental to research that evaluates pain objectively, and is expected to be used as an auxiliary diagnostic tool for Esthesiometer medical devices.

발도르프 學校 敎育의 現場適用에 觀한 硏究

이진욱 成均館大學校 2002 국내석사

자기주도학습을 위한 교사의 역할에 관한 문화기술연구 : 함께 작업장 학교 교수-학습활동을 중심으로

이진욱 성균관대학교 일반대학원 2010 국내박사

The purpose of this study is to understand the roles of 'Hamke Workshop School' teachers for learners' self-directed learning and to interpret their educational meanings. This alternative school is for youths who dropped out of school. One of the educational goals of this school is youths' self-directed learning. An ethnographic study methodology including participant observation, in-depth interview and unobtrusive datum analysis has been used in this study in order to illuminate various efforts of teachers for learners' self-directed learning. Recently, self-directed learning theory entered on the stage, and it was expected to be alternative theory dissolving the limits of traditional learning theory. Self-directed learning got much popularity among the group of scholars, teachers and parents who paid attention to the idea of self-directed learning. But the roles of teacher for self-directed learning are not presented obviously. So it can be misunderstood in negative and passive way by teachers. Teachers might be under the misunderstand that self-directed learning is self-study without a teacher. Teachers might be under the misunderstand that they should not intervene in learning process for learner's self-directed learning. So the roles of teacher for self-directed learning must be presented obviously. This study focuses on three questions as follows. First, what do 'Hamke Workshop School' teachers think of the reason for the helplessness of learners? Second, what is the roles of 'Hamke Workshop School' teachers for learners' self-directed learning? Third, what is the educational meaning of their roles? The results of this study are as follows. 'Hamke Workshop School' teachers don't think that self-directed learning is self-study without a teacher. They also don't think that self-directed learning does not mean to give the leadership to learners and to be degraded to marginal man. Instead, they believe that 'trust' and 'rapport' between teacher and learner turns youths to self-directed learners. 'Hamke Workshop School' teachers think the hurt by others is responsible for the helplessness of the youths. The youths hurt in their family by the marital discord and divorce of their parents. The youths hurt in their old public school by the exclusion from their classmates or disregard of their teachers. 'Hamke Workshop School' teachers believe that 'healing' the hurt within the youths and giving 'confidence' can change them into real self-directed learners. Trust and rapport between teacher and learner can facilitate this change too. To change them into real self-directed learners, first, 'Hamke Workshop School' teachers try to arouse a clear 'sense of purpose' in the youths. So the teachers ask them questions often about meaning of each activity. These questions get the youths to pay attention to meaning and essence of the activities what they are doing. Gradually, the youths have asked themselves the questions even when teacher is not by their side. Learning activity was "the last things that they want to do", but now learning activity is "hard work but meaningful" for them. Second, 'Hamke Workshop School' teachers try to offer them the 'experience of healing'. Experience of writing in 'Hamke Workshop School' such as 'Writing autobiography project' and 'Writing a novel project provide a chance to reveal their hurt. From this experience, the youths can reinterpret their hurt and problems from a mature viewpoint and recover their 'self-confidence' and 'self-esteem'. At this very moment, 'trust' and 'rapport' between teacher and learner can facilitate the youths to reveal their hurt frankly. Meanwhile sympathy and encouragement of classmates is a comport to them. Achievements of classmates also encourage them. In this process, some teachers get a special experience of healing their own hurt. Third, 'Hamke Workshop School' teachers try to offer them the 'opportunity of reflection'. The teachers set up the chance for self-reflection such as "Showhaja(a kind of school arts festival)". Through clapping and cheering of others, the youths on the "Showhaja" stage can recover their 'self-confidence' and 'self-esteem'. In this process, the youths think back on this semester and take time for self-examination. Finally, they make their own learning plans for themselves that cater for their need. The educational meanings of the role of 'Hamke Workshop School' teachers are as follows. First, the teachers perform the role as "facilitator of communication". They think that the profound 'relationship' with other people is the motive power of learner's learning behavior. Second, the teachers perform the role as "guide to self-reflection". Learners' self-reflection can lead themselves to active drawing up their own learning plans. Third, the teachers perform the role as "helper who can wait with patience". Because the youths need enough time to change into self-directed learners, teachers have to wait with patience and understanding. In conclusion, self-directed learning is not self-study without a teacher. Self-directed learning is rather facilitated by the interaction with teachers and other people. Self-directed learning is the process of learner's to find 'himself' and find the his own 'meaning' of learning through close interaction and profound 'relationship' with teachers. 이 연구는 자기주도학습을 학습원리로 표방하는 한 청소년 대안학교의 교수-학습과정을 참여관찰하여 학습자의 자기주도학습을 위해 교사는 어떤 역할을 수행하고 있는지를 이해하고자 하였다. 이러한 문제의 답을 찾기 위한 구체적인 방법으로는 참여관찰 및 심층면담, 비개입 데이터 분석을 주로 활용한 문화기술 방법을 활용하였다. 자기주도학습은 최근 큰 관심을 모으고 있는 학습 원리이기는 하지만 이를 위해 교사가 어떤 역할을 수행해야 하는지에 대한 명확한 설명이 없는 형편이다. 게다가 많은 사람들은 교사는 학습자의 학습 주도를 방해할 수 있는 존재이기 때문에 학습자의 학습과정에 최대한 개입하지 말아야 한다는 식으로 이해하고 있다. 때문에 흔히 언급되는 교사의 역할인 ‘안내자’ ‘조력자’ 또는 ‘촉진자’는 어떤 역할을 의미하는 것인지가 분명히 밝혀질 필요가 있다. 함께 작업장 학교 교사들은 자기주도학습을 학습자 혼자 학습하는 것으로 생각하지 않으며 교사가 주도권을 내어주고 주변인으로 물러서는 것으로 보지 않는다. 오히려 학습자와의 친화관계 및 신뢰관계 형성을 통하여 주도적인 학습행동을 이끌어 내려고 한다. 우선 교사들은 아이들이 자발적인 학습행동을 보이지 않는 원인은 과거에 이들이 받은 상처 때문이라고 생각한다. 아이들은 가정에서 부모의 불화와 이혼 과정에서 큰 상처를 받는다. 또한 학교에서는 급우들로부터 왕따를 당하거나 친한 친구로부터의 배신, 교사들의 무시하는 행동 등에서 상처를 입기도 한다. 교사들은 신뢰관계 형성을 통해 이러한 상처를 치유하고 자신을 찾는 과정을 자기주도학습을 위한 과정으로 생각한다. 이 연구에서는 이 과정을 ‘자기 찾아주기’로 명명하였다. ‘자기 찾아주기’의 첫 번째 과정은 ‘목적의식 갖게 하기’이다. 교사들은 아이들에게 활동의 의미나 이유를 묻는 질문을 자주 한다. 이러한 질문은 아이들로 하여금 자신들의 학습활동의 본질과 의미에 주의를 기울이게 만들며 아이들은 점점 이러한 질문을 스스로 던지는 변화를 보인다. 처음에는 학교에서 시키는 “죽도록 하기 싫은 일”이 이러한 질문과정을 통해 “힘들지만 의미 있는 일”로 생각하게 된다. 두 번째 과정은 글쓰기를 통해 ‘치유의 경험 제공하기’이다. 자전적 글쓰기나 소설쓰기와 같은 글쓰기는 아이들이 자신들의 상처를 글로 써보는 경험을 통해 그 문제를 재해석하고 용기와 자신감을 얻는 치유의 성격을 가지고 있다. 이 때 교사와 맺는 “신뢰관계”는 아이들이 자신의 경험을 솔직하게 드러낼 수 있도록 하는 데 중요하게 작용한다. 동료들로부터 공감과 격려를 받으면서 위안을 얻기도 하며 동료의 글쓰기 과정을 보며 용기를 얻기도 한다. 이 때 일부 교사들은 아이들의 치유를 돕는 과정에서 교사 자신의 상처를 치유하는 경험을 하기도 한다. 세 번째 과정은 자신의 학습과정을 반성하고 평가할 수 있는 ‘성찰의 기회를 제공하기’이다. 교사들은 “쇼하자”를 비롯하여 다양한 평가 기회를 배치해 놓고 있다. 이는 다른 사람들로부터 박수와 칭찬을 받으면서 “자신감”과 “자존감”을 얻는 자리이자 자신의 학습과정을 정리하고 성찰하는 기회가 된다. 작업장 학교 교사들이 보여준 교수활동의 교육적 의미로는 첫째, 이들은 ‘소통’을 강조하는 ‘소통의 촉진자’로서의 역할을 보여준다. 이들은 학습자들이 타인과 맺는 관계가 학습을 하게 만드는 동력이라고 생각한다. 둘째, 자기성찰의 기회를 제공해 주는 ‘자기성찰로의 안내자’로서의 역할을 보여준다. 남과의 비교가 아니라 스스로를 반성하는 성찰은 스스로 자신의 학습을 설계하고 계획하는 자기주도적인 학습 행동으로 이어지게 하였다. 셋째, ‘기다려 주는 조력자’로서의 역할을 보여준다. 지켜보고 기다려 주는 교사가 곁에 있다는 사실만으로도 학습자는 뭔가 할 수 있을 것 같다는 자신감을 얻는다. 결국 자기주도학습은 교사와 학습자 간의 긴밀한 상호작용과 신뢰관계 형성을 통하여 소통하고 성찰하는 가운데 자기 ‘자신’을 찾고 학습의 ‘의미’를 찾아나가는 과정임을 알 수 있다.