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이장로(J. R. Rhee),장현숙(H. S. Jang),김미양(M. Y. Kim),이용호(Y. H. Lee),손봉균(P. K. Shon) 한국자기학회 1992 韓國磁氣學會誌 Vol.2 No.2
Studies have been done experimentally to investigate the effects of the Fe sublayer thickness on magnetization, anisotropy, and Kerr rotation in 8.8Å Tb/ XÅ Fe (X = 5.4~11) compositionally modulated films prepared in a multiple-gun sputtering chamber with rotating table. The ranges of Fe sublayer thickness required for perpendicular anisotropy were determined. The interface and volume anisotropy energies for Tb/Fe films were estimated. The annealing tempereture dependence of magnetic and magneto-optic properties has been discussed.
CoFeSiB/Ru/CoFeSiB 자유층을 갖는 자기터널 접합의 스위칭 자기장
이선영,이서원,이장로,Lee, S.Y.,Lee, S.W.,Rhee, J.R. 한국자기학회 2007 韓國磁氣學會誌 Vol.17 No.3
Magnetic tunnel junctions (MTJs), which consisted of amorphous CoFeSiB layers, were investigated. The CoFeSiB layers were used to substitute for the traditionally used CoFe and/or NiFe layers with an emphasis given on understanding the effect of the amorphous free layer on the switching characteristics of the MTJs. CoFeSiB has a lower saturation magnetization ($M_s\;:\;560\;emu/cm^3$) and a higher anisotropy constant ($K_u\;:\;2800\;erg/cm^3$) than CoFe and NiFe, respectively. An exchange coupling energy ($J_{ex}$) of $-0.003\;erg/cm^2$ was observed by inserting a 1.0 nm Ru layer in between CoFeSiB layers. In the Si/$SiO_2$/Ta 45/Ru 9.5/IrMn 10/CoFe 7/$AlO_x$/CoFeSiB 7 or CoFeSiB (t)/Ru 1.0/CoFeSiB (7-t)/Ru 60 (in nm) MTJs structure, it was found that the size dependence of the switching field originated in the lower $J_{ex}$ using the experimental and simulation results. The CoFeSiB synthetic antiferromagnet structures were proved to be beneficial for the switching characteristics such as reducing the coercivity ($H_c$) and increasing the sensitivity in micrometer size, even in submicrometer sized elements. 비정질 $Co_{70.5}Fe_{4.5}Si_{15}B_{10}$층을 갖는 자기터널접합(magnetic tunneling junctions; MTJ)를 연구하였다. 비정질 자유층이 MTJ의 스위칭 특성에 미치는 영향을 중점적으로 이해하기 위하여 기존의 사용된 CoFe 그리고 NiFe층들을 대신하여 비정질 강자성체 CoFeSiB을 사용하였다. CoFeSiB은 CoFe과 NiFe보다 각각 낮은 포화자기장($M_s:\;560\;emu/cm^3$)과 높은 자기이방성 상수($K_u:\;0.2800\;erg/cm^3$)를 갖는다. CoFeSiB층들의 사이에 1.0 nm Ru층 삽입시 $-0.003\;erg/cm^3$ 교환결합에너지($J_{ex}$)를 나타내었다. $Si-SiO_2-Ta$ 45/Ru 9.5/IrMn 10/CoFe 7/$AlO_x$/CoFeSiB 7 또는 CoFeSiB (t)/Ru 1.0/CoFeSiB (7-t)/Ru 60(in nm) MTJ 구조의 터널접합에 대하여 실험 및 시뮬레이션 결과를 통하여 낮은 $J_{ex}$에 기인하는 스위칭 자기장(switching field; $H_{sw}$)의 시료 크기 의존성이 나타나는 것을 알 수 있었다. CoFeSiB 합성형 반강자성 구조는 micrometer뿐만 아니라 submicrometer 시료 크기영역에서도 보자력($H_c$)의 감소와 민감도를 증가 시킴으로써 자기 스위칭 특성에 유리한 것으로 확인 되었다.
CoFe/NiFeSiB/CoFe 자유층을 갖는 이중장벽 자기터널접합의 바이어스전압 의존특성
이선영,이장로,Lee, S.Y.,Rhee, J.R. 한국자기학회 2007 韓國磁氣學會誌 Vol.17 No.3
이 연구에서는 Ta 45/Ru 9.5/IrMn 10/CoFe $3/AlO_x$/자유층/$AlO_x$/CoFe 7/IrMn 10/Ru 60(nm) 구조를 갖는 이중장벽 자기터널접합(double-barrier magnetic tunnel junction: DMTJ)를 다루었다. 자유층은 $Ni_{16}Fe_{62}Si_8B_{14}\;7nm$, $Co_{90}Fe_{10}(fcc)$ 7 nm 및 $CoFet_1$/NiFeSiB $t_2$/CoFe $t_1$으로 구성하였으며 두께 $t_1,\;t_2$는 변화시켰다. 즉 TMR비와 RA를 개선하기 위하여 부분적으로 CoFe층을 대체할 수 있는 비정질 NiFeSiB층이 혼합된 자유층 CoFe/NiFeSiB/CoFe을 갖는 DMTJ를 연구하였다. NiFeSiB($t_1=0,\;t_2=7$)만의 자유층을 갖는 DMTJ는 터널자기저항(TMR)비 28%, 면적-저항곱(RA) $86k{\Omega}{\mu}m^2$, 보자력($H_c$) 11 Oe 및 층간 결합장($H_i$) 20 Oe를 나타내었다. $t_1=1.5,\;t_2=4$인 경우의 하이브리드 DMTJ는 TMR비 30%, RA $68k{\Omega}{\mu}m^2$ 및 $H_c\;11\;Oe$를 가졌으나 $H_i$는 37 Oe로 증가하였다. 원자현미경(AFM)과 투과전자현미경(TEM)측정을 통하여 NiFeSiB층 두께가 감소하면 $H_i$가 증가하는 것을 확인하였다. 비정질 NiFeSiB층이 두꺼워지면 보통 계면의 기복을 유도하는 원주형성장(columnar growth)를 지연시키는데 유효하였다. 그러나 NiFeSiB층이 얇으면 표면거칠기는 증가하고 전자기적 Neel 결합 때문에 Hi는 커졌다. The typical double-barrier magnetic tunnel junction (DMTJ) structure examined in this paper consists of a Ta 45/Ru 9.5/IrMn 10/CoFe7/$AlO_x$/free layer/AlO/CoFe 7/IrMn 10/Ru 60 (nm). The free layer consists of an $Ni_{16}Fe_{62}Si_8B_{14}$ 7 nm, $Co_{90}Fe_{10}$ (fcc) 7 nm, or CoFe $t_1$/NiFeSiB $t_2$/CoFe $t_1$ layer in which the thicknesses $t_1$ and $t_2$ are varied. The DMTJ with an NiFeSiB-free layer had a tunneling magnetoresistance (TMR) of 28%, an area-resistance product (RA) of $86\;k{\Omega}{\mu}m^2$, a coercivity ($H_c$) of 11 Oe, and an interlayer coupling field ($H_i$) of 20 Oe. To improve the TMR ratio and RA, a DMTJ comprising an amorphous NiFeSiB layer that could partially substitute for the CoFe free layer was investigated. This hybrid DMTJ had a TMR of 30%, an RA of $68\;k{\Omega}{\mu}m^2$, and a of 11 Oe, but an increased of 37 Oe. We confirmed by atomic force microscopy and transmission electron microscopy that increased as the thickness of NiFeSiB decreased. When the amorphous NiFeSiB layer was thick, it was effective in retarding the columnar growth which usually induces a wavy interface. However, if the NiFeSiB layer was thin, the roughness was increased and became large because of the magnetostatic $N{\acute{e}}el$ coupling.
강자성 비정질 NiFeSiB 자유층을 갖는 자기터널접합의 스위칭 특성
황재연(J. Y. Hwang),이장로(J. R. Rhee) 한국자기학회 2006 韓國磁氣學會誌 Vol.16 No.6
Magnetic tunnel junctions (MTJs), which consisted of amorphous ferromagnetic NiFeSiB free layers, were investigated. The NiFeSiB layers were used to substitute for the traditionally used CoFe and/or NiFe layers with the emphasis being given to obtaining an understanding of the effect of the amorphous free layer on the switching characteristics of the MTJs. Ni₁?Fe?₂Si?B₁₄ has a lower saturation magnetization (M<SUB>s</SUB>: 800 emu/㎤) than Co??Fe₁? and a higher anisotropy constant (K<SUB>u</SUB>: 2,700 erg/㎤) than Ni??Fe₂?. The Si/SiO₂/Ta 45/Ru 9.5/IrMn 10/CoFe 7/AlO<SUB>x</SUB>/NiFeSiB t/Ru 60 (in nanometers) structure was found to be beneficial for the switching characteristics of the MTJ, leading to a reduction in the coercivity (H<SUB>c</SUB>) and an increase in the sensitivity resulted from its lower saturation magnetization and higher uniaxial anisotropy. Furthermore, by inserting a very thin CoFe layer at the tunnel barrier/NiFeSiB interface, the TMR ratio and switching squareness were improved more with the increase of NiFeSiB layer thickness up to 11㎚.
Bottom형 IrMn 스핀밸브 박막의 열적안정성과 높은 교환결합력
황재연(J. Y. Hwang),김미양(M. Y. Kim),이장로(J. R. Rhee) 한국자기학회 2002 韓國磁氣學會誌 Vol.12 No.2
IrMn pinned spin valve (SV) films with stacks of Ta/NiFe/IrMn/CoFe/Cu/CoFe/NiFe/Ta were prepared by dc sputtering onto thermally oxidized Si (111) substrates at room temperature under a magnetic field of about 100 Oe. The annealing cycle number and temperature dependence of exchange coupling field (Hex), magnetoresistance (MR) ratio, and coercivity (Hc) were investigated. By optimizing the process of deposition and post thermal annealing condition, we obtained the IrMn based SV films with MR ratio of 3.6 %, Hex of 1180 Oe for the pinned layer. The Hex is stabilized after the second annealing cycle and it is thought that this SV reveals high thermal stability. The Hex maintained its strength of 600 Oe in operation up to 240 ℃ and decreased monotonically to zero at 270 ℃.